Patent Application
Utility
App. No. 10/299,838
· Confirmation No. 5821
PROCESS AND APPARATUS FOR MANUFACTURING A SEMICONDUCTOR DEVICE
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2004-09-30 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-07-01 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-07-01 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 2 | View | |
| 2004-07-01 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-07-01 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-07-01 | FWCLM |
Index of Claims | 1 | View | |
| 2004-06-01 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 3 | View | |
| 2004-06-01 | CLM |
Claims | 5 | View | |
| 2004-06-01 | REM |
Applicant Arguments/Remarks Made in an Amendment | 2 | View | |
| 2004-03-01 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-03-01 | FWCLM |
Index of Claims | 1 | View | |
| 2004-03-01 | CTNF |
Non-Final Rejection | 4 | View | |
| 2004-03-01 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-03-01 | 1449 |
List of References cited by applicant and considered by examiner | 2 | View | |
| 2004-03-01 | FOR |
Foreign Reference | 11 | View | |
| 2003-12-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-11-17 | ELC. |
Response to Election / Restriction Filed | 1 | View | |
| 2003-11-17 | CLM |
Claims | 5 | View | |
| 2003-11-17 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2003-11-17 | LET. |
Miscellaneous Incoming Letter | 2 | View | |
| 2003-11-07 | CTRS |
Requirement for Restriction/Election | 4 | View | |
| 2003-01-03 | OATH |
Oath or Declaration filed | 4 | View | |
| 2003-01-03 | LET. |
Miscellaneous Incoming Letter | 4 | View | |
| 2002-12-26 | CTMS |
Miscellaneous Action with shortened statutory period (SSP) | 1 | View | |
| 2002-11-20 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-11-20 | SPEC |
Specification | 34 | View | |
| 2002-11-20 | CLM |
Claims | 7 | View | |
| 2002-11-20 | ABST |
Abstract | 1 | View | |
| 2002-11-20 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2002-11-20 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-11-20 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2002-11-20 | FWCLM |
Index of Claims | 1 | View | |
| 2002-11-20 | TRNA |
Transmittal of New Application | 1 | View | |
| 2002-11-20 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2002-11-20 | SPEC |
Specification | 34 | View | |
| 2002-11-20 | CLM |
Claims | 7 | View | |
| 2002-11-20 | ABST |
Abstract | 1 | View | |
| 2002-11-20 | OATH |
Oath or Declaration filed | 2 | View | |
| 2002-11-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-11-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2002-11-20 | WCLM |
Claims Worksheet (PTO-2022) | 1 | View | |
| 2002-11-20 | FRPR |
Certified Copy of Foreign Priority Application | 41 | View | |
| 2002-11-20 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 3 | View | |
| 2002-11-20 | FOR |
Foreign Reference | 9 | View | |
| 2002-11-20 | FOR |
Foreign Reference | 5 | View |
Inventors
Yoshio Homma
Hinode, JAPAN
Noriyuki Sakuma
Hachioji, JAPAN
Hiroshi Nakano
Hitachi, JAPAN
Takeyuki Itabashi
Hitachi, JAPAN
Haruo Akahoshi
Hitachi, JAPAN
Attorneys & Agents of Record
Classification
USPC
438/695
C23C18/1603
C25D5/02
H10W20/037
H10P14/46
H10W20/056
C23C18/00
C25D17/001
Prosecution
- Examiner
- PICARDAT, KEVIN M
- Art Unit
- 2822
- Customer No.
- 38327
- Docket No.
- HITA.0295
- Confirmation No.
- 5821
Foreign Priority
P2001-361912
·
2001-11-28
·
JAPAN
Publication
- Pub. No.
- US20030098241A1
- Pub. Date
- 2003-05-29
Patent Term Adjustment
0days
No related applications found.
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2006-11-28
from
HITACHI, LTD.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-10-01
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-01-03
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Quick Facts
- App. No.
- 10/299,838
- Filed
- 2002-11-20
- Granted
- 2004-11-09
- Pub. No.
- US20030098241A1
- Examiner
- PICARDAT, KEVIN M
- Art Unit
- 2822
- PTA
- 0 days
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