Simplified upper electrode contact structure for PIN diode active pixel sensor
View Patent ↗An active pixel sensor having a transparent conductor that directly contacts a conductive element in an interconnection structure to electrically connect the transparent conductor to a pixel sensor bias voltage is provided. The active pixel sensor includes a semiconductor substrate, the interconnection layer, which is formed over the substrate, and a pixel interconnection layer formed over the interconnection layer. Photo sensors that include a pixel electrode, an I-layer, and may include a P-layer are formed over the pixel interconnection layer. The transparent conductor is formed over the photo sensors and the conductive element exposed on the surface of the interconnection layer.
1. A method of forming an active pixel sensor comprising the acts of:
providing a semiconductor substrate;
forming an interconnection structure adjacent the semiconductor substrate said having a first conductive element that passes through the interconnection structure to the substrate;
forming a sensor interconnect structure adjacent the interconnection structure;
forming at least one pixel electrode adjacent the sensor interconnect structure;
depositing an intrinsic layer over the at least one pixel electrode;
removing a portion of the intrinsic layer and a portion of the sensor interconnect structure to expose the first conductive element; and
after said removing, depositing a conductive contact layer over the intrinsic layer and the exposed first conductive element, wherein an inner surface of the conductive contact layer is physically and electrically connected to the intrinsic layer, and the inner surface of the conductive contact layer is physically connected to the first conductive element to electrically connect the conductive contact layer to the substrate.
2. The method of forming an active pixel sensor of claim 1 , wherein the first conductive element comprises a bond pad and a metal plug.
3. The method of forming an active pixel sensor of claim 1 , wherein the at least one pixel electrode and the intrinsic layer form a photo sensor and the substrate comprises active circuits that sense charge accumulated by the photo sensor due to the photo sensor receiving light.
4. The method of forming and active pixel sensor of claim 1 , wherein forming the at least one pixel electrode comprises:
depositing an inner metal layer over the sensor interconnect structure;
depositing a pixel electrode layer over the inner metal layer; and
etching the pixel electrode layer and inner metal layer according to a predetermined pattern.
5. The method of forming an active pixel sensor of claim 4 , wherein the pixel electrode layer is an N-type layer.
6. The method of forming an active pixel sensor of claim 4 , wherein the pixel electrode layer is a P-type layer.
7. The method of forming an active pixel sensor of claim 1 , wherein the interconnection structure comprises a second conductive element, the method further comprising removing a portion of the intrinsic layer, a portion of the sensor interconnect structure and a portion of the conductive contact layer to expose the second conductive element.
8. The method of forming an active pixel sensor of claim 1 , further comprising depositing a P-type layer onto the intrinsic layer, the inner surface of the conductive contact layer electrically connected to the P-type layer, the intrinsic layer, and the sensor interconnect structure, the method further comprising etching the P-type layer to expose the first conductive element.
9. The method of forming an active pixel sensor of claim 8 , wherein the P-type layer comprises amorphous silicon.