An aspect of the present invention includes a method for homogenizing a beam of electromagnetic radiation. Said beam of electromagnetic radiation is impinged onto a first array of deflecting elements. Said beam of electromagnetic radiation is dispersed into a number of spatially separated beamlets by said first array of deflecting elements. Said beamlets are deflected by said first array of deflecting elements. Said deflected beamlets are impinged onto a second array of deflecting elements. Said beamlets are superimposed at a target plane to thereby form a radiation beam having a homogenized spatial intensity distribution. The invention also relates to an apparatus for homogenizing a beam of electromagnetic radiation.
1. A method for homogenizing a beam of electromagnetic radiation, comprising the actions of:
impinging said beam of electromagnetic radiation onto a first array of deflecting elements,
deflecting said beam of electromagnetic radiation into numerous spatially separated beamlets by said first array of deflecting elements,
impinging said deflected beamlets onto a second array of deflecting elements, and
superimposing said beamlets from the second array of deflecting elements at a target plane whereby a radiation beam having a homogenized spatial intensity distribution is formed;
wherein the spatially separated beamlets from at least two adjoining deflecting elements of said first array impinge on non-adjoining deflecting elements of said second array.
2. The method according to claim 1 , further including focusing the deflected beamlets through a separate lens arrangement placed between said first and second arrays and/or between said second array and said target plane.
3. The method according to claim 1 , wherein at least one of the deflecting elements in said first array and/or second array comprises at least one prism.
4. The method according to claim 1 , wherein at least one of the deflecting elements in said first array and/or second array comprises at least one grating.
5. The method according to claim 1 , wherein at least one of the deflecting elements in said first array and/or second array comprises at least one Fresnel lens.
6. The method according to claim 1 , wherein at least two beamlets deflected from adjacent elements of said first array are transmitted non-parallel between said first and second arrays.
7. The method according to claim 1 , wherein at least one array is transmissive.
8. The method according to claim 1 , wherein at least one array is reflective.
9. The method according to claim 1 , wherein shapes of illuminated areas of said first and said second arrays are different.
10. The method according to claim 1 , wherein at least one deflecting element in said first array has a different shape than at least one deflecting element in said second array.
11. The method according to claim 1 , wherein patterns of arrangement of the deflecting elements in said first and second arrays are different.
12. The method according to claim 1 , wherein at least two deflecting elements in said first array are differently shaped.
13. The method according to claim 1 , wherein at least two deflecting elements in said second array are differently shaped.
14. The method according to claim 1 , wherein at least one of said first array and said second array is rotatable.
15. The method according to claim 1 , wherein at least some of said deflecting elements comprise focusing power.
16. An apparatus for homogenizing a beam of electromagnetic radiation comprising:
a source of electromagnetic radiation
a first array of deflecting elements arranged to receive said electromagnetic radiation and to deflect said beam of electromagnetic radiation into a number of spatially separated beamlets,
a second array of deflecting elements arranged to receive said beamlets deflected from said first lens array and to superimpose said spatially separated beamlets at a target plane whereby a radiation beam having a homogenized spatial intensity distribution is formed;
wherein the spatially separated beamlets from at least two adjoining deflecting elements of said first array impinge on non-adjoining deflecting elements of said second array.
17. The apparatus according to claim 16 , wherein at least some of said deflecting elements comprise focusing power.
18. The apparatus according to claim 16 , wherein focusing power is accomplished by a separate lens arrangement arranged between said first array and said second array and/or said second array and said target plane.
19. The apparatus according to claim 16 , wherein at least one of the deflecting elements in said first and/or second arrays comprises at least one prism.
20. The apparatus according to claim 16 , wherein at least one of the deflecting elements in said first and/or second arrays comprises at least one grating.
21. The apparatus according to claim 16 , wherein at least one of the deflecting elements in said first and/or second arrays comprises at least one Fresnel lens.
22. The apparatus according to claim 16 , wherein said at least two beamlets from adjacent deflecting elements are brought non-parallel between said first and said second array.
23. The apparatus according to claim 16 , wherein at least one of the arrays is transmissive.
24. The apparatus according to claim 16 , wherein at least one of the arrays is reflective.
25. The apparatus according to claim 16 , wherein a shape of illuminated areas of said first and said second arrays are different.
26. The apparatus according to claim 16 , wherein at least one deflecting element in said first array has a different shape than at least one deflecting element in said second array.
27. The apparatus according to claim 16 , wherein patterns of arrangement of the deflecting elements in said first array and said second array are different.
28. The apparatus according to claim 16 , wherein at least two deflecting elements in said first array are differently shaped.
29. The apparatus according to claim 16 , wherein at least two deflecting elements in said second array are differently shaped.
30. The apparatus according to claim 16 , wherein at least one of said first array and said second array is rotatable.