Method for oxidizing a metal layer
View Patent ↗A method for oxidizing a semiconductor topography is provided, which includes generating a plasma from a first gas comprising oxygen and a second gas adapted to enhance the generation of oxygen radicals from the first gas. In addition, the method includes extracting the oxygen radicals from the plasma and diffusing the oxygen radicals into one or more layers of the topography. In general, the second gas may include any gas having a component adapted to enhance the generation of oxygen radicals from the first gas. For example, in some embodiments, the second gas may include a gas including nitrogen. In such an embodiment, the ratio of the first gas to the second gas may be adapted to prevent the introduction of nitrogen within the oxidized topography. In addition or alternatively, such a method may include oxidizing a portion of a layer which has a thickness greater than approximately 6 angstroms.
1. A method for forming a metal oxide layer, comprising:
generating a plasma from a first gas comprising oxygen and a second gas adapted to enhance the generation of oxygen radicals from the first gas;
extracting the oxygen radicals from the plasma; and
diffusing the extracted oxygen radicals into a metal layer.
2. The method of claim 1 , wherein the second gas comprises nitrogen.
3. The method of claim 2 , wherein the second gas comprises diatomic nitrogen gas.
4. The method of claim 2 , wherein the second gas comprises ammonia.
5. The method of claim 2 , wherein the second gas is further adapted to contribute additional oxygen radicals to the plasma.
6. The method of claim 5 , wherein the second gas comprises nitrous oxide.
7. The method of claim 1 , wherein the method is adapted to prevent the oxidation of layers underlying the metal layer.
8. A method for processing a semiconductor topography, comprising:
generating a plasma from a first gas comprising oxygen and a second gas comprising nitrogen; and
oxidizing a layer of the semiconductor topography with the plasma to form an oxidized layer substantially absent of nitrogen.
9. The method of claim 8 , wherein the plasma comprises a nitrogen to oxygen ratio between approximately 0.00002 and approximately 0.3.
10. The method of claim 9 , wherein the oxidized layer comprises a tunneling layer of a magnetic tunnel junction.
11. The method of claim 8 , wherein the step of oxidizing comprises oxidizing a portion of the layer having a thickness greater than approximately 6 angstroms.
12. The method of claim 8 , wherein the layer comprises a metal.
13. The method of claim 12 , wherein the metal comprises aluminum.
14. The method of claim 12 , wherein the metal comprises nickel-iron.
15. A method for forming a metal oxide layer comprising oxidizing a metal layer within a remote plasma reaction chamber at a temperature of less than approximately 300° C., wherein the step of oxidizing comprises:
generating a plasma from a first gas comprising oxygen and a second gas comprising nitrogen, wherein the second gas is adapted to enhance the generation of oxygen radicals from the first gas, and wherein the ratio of the first gas to the second gas is adapted to prevent the introduction of nitrogen within the metal oxide layer;
extracting the oxygen radicals from the plasma;
diffusing the extracted oxygen radicals with the metal layer; and
oxidizing a portion of the metal layer having a thickness greater than approximately 6 angstroms.
16. The method of claim 15 , wherein the step of oxidizing comprises oxidizing a portion of the metal layer comprising a thickness between approximately 8 angstroms and approximately 11 angstroms.
17. The method of claim 15 , wherein the method is adapted to prevent the oxidation of layers underlying the metal layer.
18. The method of claim 15 , wherein the step of oxidizing comprises oxidizing at a temperature less than approximately 200° C.