Method of inhibiting production of projections in metal deposited-film
View Patent ↗A method of inhibiting production of projections in a metal deposited-film according to the present invention is characterized by using a vapor deposition apparatus comprising, in a vacuum-treating chamber, an evaporating section for a depositing material, and an accommodating member and/or a holding member for accommodation and/or hold of work pieces, respectively, and, in depositing a metal depositing material on each of the surface of the work pieces with the accommodating member and/or the holding member being made rotated about the horizontal rotational axis thereof, carrying out vapor deposition with a Vickers hardness of a film formed on each of the surface of the work pieces maintained at 25 or more. According to the present invention, production of projections in a metal deposited-film can be effectively inhibited when forming the metal deposited-film of aluminum, zinc or the like on the surface of a work piece such as a rare earth metal-based permanent magnet.
1. A method of inhibiting production of projections in a metal deposited-film characterized by using a vapor deposition apparatus comprising, in a vacuum-treating chamber, an evaporating section for a depositing material, and an accommodating member and/or a holding member for accommodation and/or hold of work pieces, respectively, and, in depositing a metal depositing material on each of the surface of said work pieces with said accommodating member and/or said holding member being made rotated about the horizontal rotational axis thereof, carrying out vapor deposition with a Vickers hardness of a film formed on each of the surface of said work pieces maintained at 25 or more.
said accommodating member and/or a holding member for accommodation and/or hold of work pieces is a tubular barrel for accommodation of said work pieces,
said tubular barrel is formed of a mesh net having an open area ratio of 50 to 85%,
said tubular barrel is revolvably supported circumferentially outside a horizontal rotational axis of a support member made rotatable about the rotational axis, for revolution about the rotational axis of said support member by rotating said support member,
said tubular barrel revolves about the rotational axis of said support member, whereby vapor deposition is carried out under a condition that said work pieces collide with and rub against one another in said tubular barrel,
a plurality of said tubular barrels are supported in an annular shape circumferentially outside the rotational axis of said support member, and
said work piece is a rare earth metal-based permanent magnet.
2. A method according to claim 1 characterized in that a temperature of each of said work pieces accommodated and/or held in said accommodating member and/or said holding member, respectively, is maintained at ⅔ or less a melting point in bulk (Tm)(° C.) of said metal depositing material to thereby maintain the Vickers hardness of said film formed on each of the surface of said work pieces at 25 or more.
3. A method according to claim 2 characterized in that said metal depositing material is aluminum, with which vapor deposition is carried out with a temperature of said work piece maintained at 350° C. or less.
4. A method according to claim 2 characterized in that said metal depositing material is zinc, with which vapor deposition is carried out with a temperature of said work piece maintained at 250° C. or less.
5. A method according to claim 1 characterized in that the vapor deposition is carried out by a vacuum evaporation process or an ion plating process.
6. A method according to claim 1 characterized in that said tubular barrel and/or said support member supporting said tubular barrel are/is detachably constituted.