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Granted Patent Utility PCT National Stage
US 6,734,597 · Confirmation No. 6701

THERMOMECHANICAL IN-PLANE MICROACTUATOR

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Quick Facts
Patent No.
US 6,734,597
App. No.
10/312,172
Filed
2002-12-18
Granted
2004-05-11
Pub. No.
US20040074234A1
Art Unit
2834
PTA
0 days