IP Library › Granted Patent US 6,759,339
Granted Patent Utility
US 6,759,339 · Confirmation No. 9604

METHOD FOR PLASMA ETCHING A MICROELECTRONIC TOPOGRAPHY USING A PULSE BIAS POWER

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2005-01-25 COCOUT Certificate of Correction - Post Issue Communication 1 View
2005-01-25 COCOUT Certificate of Correction - Post Issue Communication 1 View
2004-10-04 COCIN Request for Certificate of Correction 3 View
2004-05-24 CTMS Miscellaneous Action with shortened statutory period (SSP) 2 View
2004-05-24 1449 List of References cited by applicant and considered by examiner 1 View
2004-05-19 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-19 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-02-19 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-02-19 SRFW Search information including classification, databases and other search related notes 1 View
2004-02-19 FWCLM Index of Claims 1 View
2004-01-09 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2003-12-31 FWCLM Index of Claims 1 View
2003-12-31 WFEE Fee Worksheet (SB06) 1 View
2003-12-09 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2003-12-09 CLM Claims 3 View
2003-12-09 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2003-09-11 CTNF Non-Final Rejection 6 View
2003-09-11 892 List of references cited by examiner 1 View
2003-09-11 1449 List of References cited by applicant and considered by examiner 1 View
2003-09-11 FWCLM Index of Claims 1 View
2003-09-11 SRFW Search information including classification, databases and other search related notes 1 View
2003-04-02 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2003-02-07 C.AD Change of Address 1 View
2002-12-13 TRNA Transmittal of New Application 2 View
2002-12-13 SPEC Specification 20 View
2002-12-13 CLM Claims 4 View
2002-12-13 ABST Abstract 1 View
2002-12-13 DRW Drawings-only black and white line drawings 1 View
2002-12-13 OATH Oath or Declaration filed 2 View
2002-12-13 TRNA Transmittal of New Application 2 View
2002-12-13 DRW Drawings-only black and white line drawings 1 View
2002-12-13 SPEC Specification 20 View
2002-12-13 CLM Claims 4 View
2002-12-13 ABST Abstract 1 View
2002-12-13 OATH Oath or Declaration filed 2 View
2002-12-13 WFEE Fee Worksheet (SB06) 1 View
2002-12-13 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,759,339
App. No.
10/319,318
Filed
2002-12-13
Granted
2004-07-06
Art Unit
2814
PTA
0 days