Structure of TFT planar display panel
View Patent ↗A structure of a thin film transistor (TFT) planar display panel is disclosed. The structure includes a light-transmissible substrate, a buffer layer formed on the light-transmissible substrate, a top-gate TFT structure formed on the buffer layer and including a channel region, and a light-shielding structure formed between a back light source and the top-gate TFT structure, and substantially aligned with the channel region for protecting the channel region from illumination of the back light source. The process for manufacturing a TFT planar display panel is also disclosed.
1. A structure of a thin film transistor (TFT) planar display panel comprising:
a light-transmissible substrate;
a buffer layer formed on said light-transmissible substrate;
a top-gate TFT structure formed on said buffer layer and including a channel region; and
a light-shielding structure formed between a back light source of said thin film transistor planar display panel and said top-gate TFT structure and electrically isolated from said top-gate TFT structure, and an area of said light-shielding structure being substantially aligned with and generally coextensive with said channel region for protecting said channel region from illumination of said back light source.
2. The structure according to claim 1 wherein said light-transmissible substrate is a glass substrate.
3. The structure according to claim 1 wherein said buffer layer is formed of a material selected from a group consisting of silicon nitride, silicon oxide, and a combination thereof.
4. The structure according to claim 1 wherein said light-shielding structure is formed between said back light source and said buffer layer.
5. The structure according to claim 1 wherein said light-shielding structure is formed in said buffer layer.
6. The structure according to claim 1 further comprises a black matrix which is implemented by said light-shielding structure.
7. The structure according to claim 1 wherein said top-gate TFT structure is a low temperature polycrystalline silicon (LTPS) TFT structure.
8. The structure according to claim 1 wherein said light-shielding structure is formed of an opaque material having a relatively high melting point.
9. The structure according to claim 8 wherein said light-shielding structure is formed of a material selected from a group consisting of chromium (Cr), molybdenum (Mo), tungsten (W) and organic material.
10. The structure according to claim 1 wherein said top-gate TFT structure includes:
a semiconductor layer formed on said buffer layer and formed therein said channel region and source/drain regions;
a gate insulating structure formed on said semiconductor layer;
a gate conductive structure formed on said gate insulating structure above said channel region;
a dielectric layer formed on said gate conductive structure and said gate insulating structure; and
a conductive line structure formed on said dielectric layer and penetrating through said gate insulating structure and said dielectric layer to contact with said source/drain regions in said semiconductor layer.
11. The structure according to claim 10 further comprising lightly doped drain regions disposed next to said source/drain regions and sandwiching therebetween said channel region.
12. The structure according to claim 10 wherein said semiconductor layer is a polycrystalline silicon layer.
13. The structure according to claim 10 wherein said gate conductive structure is formed of a material selected from a group consisting of chromium (Cr), tungsten molybdenum (WMo), tantalum (Ta), aluminum (Al) and copper (Cu).
14. The structure according to claim 10 wherein said gate insulating structure is formed of silicon oxide.
15. A structure of a thin film transistor (TFT) planar display panel comprising:
a light-transmissible substrate;
a buffer layer formed on said light-transmissible substrate;
a top-gate TFT structure formed on said buffer layer and including a channel region; and
a light-shielding structure formed between a back light source of said thin film transistor planar display panel and said top-gate TFT structure and electrically isolated from said top-gate TFT structure, and serving as a mask while defining said channel region of said top-gate TFT structure so that an area of said light-shielding structure is substantially aligned with and generally coextensive with said channel region for protecting said channel region from illumination of said back light source.
16. A structure of a thin film transistor (TFT) planar display panel comprising:
a light-transmissible substrate;
a light-shielding structure formed on said light transmissible substrate;
a buffer layer formed over said light-transmissible substrate;
a top-gate TFT structure formed on said buffer layer and electrically isolated from said light-shielding structure, said top-gate TFT structure having a channel region defined by a patterned photoresist, wherein said photoresist is patterned in an exposing step using said light-shielding structure as a mask so that an area of said light-shielding structure is substantially aligned with and generally coextensive with said channel region for protecting said channel region from illumination of a back light source of said thin film transistor planar display panel.