Initiating test runs based on fault detection results

1. A method, comprising:

receiving operational data associated with processing a workpiece by a processing tool;

processing the operational data to determine fault detection results;

causing a test run to be performed based on at least a portion of the fault detection results;

wherein processing comprises detecting a fault associated with the processing of the workpiece and classifying the fault and determining a particular type of test run to be performed based on the classification of the fault; and

further comprising receiving operational data associated with a processing of the workpiece from an upstream processing tool, and determining a type of test run to be performed based on the operational data received from the processing of the workpiece from the upstream processing tool.

2. The method of claim 1 , wherein processing the operational data further comprises processing the operational data to determine a health value associated with the processing tool and causing the test run to be performed further comprises causing the test run to be performed based on the determined health value.

3. The method of claim 2 , wherein the test run is caused to be performed based on determining if the health value is greater than a pre-selected threshold.

4. The method of claim 1 , wherein causing the test run to be performed comprises causing at least one of a qualification run and experimental run to be performed.

5. The method of claim 1 , wherein receiving the operational data comprises receiving at least one of metrology data associated with the processed workpiece and trace data associated with the processing tool.

6. The method of claim 1 , wherein receiving the operational data comprises receiving the operational data associated with processing of a semiconductor wafer.

7. A method, comprising:

receiving operational data associated with processing a workpiece by a processing tool;

processing the operational data to determine fault detection results;

causing a test run to be performed based on at least a portion of the fault detection results;

and calibrating the processing tool based on causing the test run to be performed.

8. An apparatus, comprising:

an interface adapted to receive operational data associated with processing of a workpiece by a processing tool; and

a control unit communicatively coupled to the interface, the control unit adapted to:

determine a health value associated with the processing tool based at least on the received operational data;

cause a test run to be performed based on the determined health value; and

calibrate the processing tool based on causing the test run to be performed.

9. The apparatus of claim 8 , wherein the control unit is adapted to cause the test run to be performed based on determining if the health value is greater than a pre-selected threshold.

10. The apparatus of claim 8 , wherein the control unit is adapted to further detect a fault associated with the processing of the workpiece and classifying the fault.

11. The apparatus of claim 10 , wherein the control unit is adapted to determine a particular type of test run to be performed based on the classification of the fault.

12. The apparatus of claim 11 , wherein the control unit is adapted to receive operational data associated with a processing of the workpiece from an upstream processing tool, and determine a particular type of test run to be performed based on the operational data received from the processing of the workpiece from the upstream processing tool.

13. The apparatus of claim 8 , wherein the processing tool further comprises an associated process controller, wherein the control unit is adapted to receive data from a virtual sensor regarding the operational state of the process controller and to cause at least one of a qualification run and experimental run to be performed based on the data received from the virtual sensor.

14. An article comprising one or more machine-readable storage media containing instructions that when executed enable a processor to:

receive operational data associated with processing of a workpiece by a processing tool;

determine a health value associated with the processing tool based at least on the received operational data; and

cause a test run to be performed based on the determined health value; and

calibrate the processing tool based on causing the test run to be performed.

15. The article of claim 14 , wherein the instructions when executed enable the processor to cause the test run to be performed based on determining if the health value is greater than a pre-selected threshold.

16. The article of claim 14 , wherein the instructions when executed enable the processor to detect a fault associated with the processing of the workpiece and classifying the fault.

17. The article of claim 16 , wherein the instructions when executed enable the processor to receive operational data associated with processing of the workpiece from an upstream processing tool, and determine a particular type of test run to be performed based on the operational data received from the processing of the workpiece from the upstream processing tool.

18. The article of claim 14 , wherein the instructions when executed enable the processor to cause at least one of a qualification run and experimental run to be performed.

19. The article of claim 14 , wherein the instructions when executed enable the processor to receive the operational data associated with processing of a semiconductor wafer.