Method for manufacturing semiconductor integrated circuit
View Patent ↗A method for manufacturing a semiconductor integrated circuit includes the steps of forming a semiconductor element on a semiconductor substrate attaching a film member on the semiconductor element, separating the semiconductor element together with the film member from the semiconductor substrate, and applying an adhesive composition to at least one of the semiconductor element and a member on which the semiconductor element is mounted. The method may further include the steps of temporary fixing the semiconductor element and the member, separating the film member from the semiconductor element, and completely fixing the semiconductor element and the member. In the method, it is preferable that the adhesive composition include the fine powder of diamond, silicon, gold, silver, copper, aluminum nitride, etc.
1. A method for manufacturing a semiconductor integrated circuit, comprising the steps of:
forming a semiconductor element on a semiconductor substrate;
attaching a film member on said semiconductor element;
separating said semiconductor element together with said film member from said semiconductor substrate;
applying an adhesive composition to at least one of said semiconductor element and a member on which said semiconductor element is mounted; and
placing said semiconductor element on a desired member by pressing a pressing element against said semiconductor element via said film member.
2. A method for manufacturing a semiconductor integrated circuit according to claim 1 , further comprising the steps of:
temporarily fixing said semiconductor element and said member;
separating said film member from said semiconductor element, and
completely fixing said semiconductor element and said member.
3. A method for manufacturing a semiconductor integrated circuit according to claim 2 , wherein the step of completely fixing said semiconductor element and said member is carried out after the step of separating said film member from said semiconductor element.
4. A method for manufacturing a semiconductor integrated circuit according to claim 1 , wherein said adhesive composition includes fine powder.
5. A semiconductor integrated circuit, comprising:
a semiconductor element, and
a member including a circuit which is connected to said semiconductor element, wherein
said semiconductor element is joined to said member using a method for manufacturing a semiconductor integrated circuit according to claim 1 .
6. An electrooptic device, comprising the semiconductor integrated circuit as claimed in claim 5 .
7. An electrooptic device according to claim 6 , further comprising:
a plurality of scan lines and data lines which are formed in a matrix;
a switching device connected to said scan lines and data lines; and
a pixel electrode connected to said switching device.
8. An electronic device, comprising the electrooptic device according to claim 7 .
9. An electrooptic device according to claim 6 , further comprising: a light emitting element.
10. An electronic device, comprising the electrooptic device according to claim 9 .
11. An electronic device, comprising the electrooptic device according to claim 6 .
12. A method for manufacturing a semiconductor integrated circuit according to claim 1 , further comprising:
reducing pressure of a side of said film member opposite another side of said film member to which said plurality of said semiconductor elements are attached, and
curving portions of said film member between each of said semiconductor elements toward the side of said film member at which the pressure is reduced.