IP Library Patent Application 10324982
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Patent Application Utility
App. No. 10/324,982 · Confirmation No. 1293

FLUID BEARINGS AND VACUUM CHUCKS AND METHODS FOR PRODUCING SAME

Inventor: Marek Zywno
Patent Expired Due to NonPayment of Maintenance Fees Under 37 CFR 1.362 View Patent ↗ View Publication ↗
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Quick Facts
App. No.
10/324,982
Filed
2002-12-19
Granted
2004-03-02
Pub. No.
US20030086628A1
Art Unit
3723
PTA
-10 days