Method and apparatus for debris mitigation for an electrical discharge source
View Patent ↗Method and apparatus for mitigating the transport of debris generated and dispersed from electric discharge sources by thermophoretic and electrostatic deposition. A member is positioned adjacent the front electrode of an electric discharge source and used to establish a temperature difference between it and the front electrode. By flowing a gas between the member and the front electrode a temperature gradient is established that can be used for thermophoretic deposition of particulate debris on either the member or front electrode depending upon the direction of the thermal gradient. Establishing an electric field between the member and front electrode can aid in particle deposition by electrostatic deposition.
1. An electrical discharge source comprising:
an electrically insulating body defining a capillary bore having an inlet and outlet;
a first electrode defining a channel having an inlet connected to a source of gas and an outlet in communication with the inlet of the capillary bore;
a second electrode defining a channel in communication with the outlet of the capillary bore;
an endcone disposed proximate said second electrode and on the axial line of the capillary bore, wherein the endcone is maintained at a temperature different from that of said second electrode; and
a source of electric potential for generating electrical pulses.
2. The discharge source of claim 1 , wherein the gas is at a pressure of at least 1 mTorr.
3. The discharge source of claim 2 , wherein the gas is xenon gas.
4. The discharge source of claim 1 , wherein said endcone comprises a material that is an electrical and thermal insulator.
5. The discharge source of claim 4 , wherein the insulator includes alumina or boron nitride.
6. The discharge source of claim 4 , further including an electrical conductor affixed to the outer surface of said endcone.
7. The discharge source of claim 6 , wherein the electrical conductor comprises a metal mesh material.
8. The discharge source of claim 7 , wherein the metal mesh material is W or Mo.
9. The discharge source of claim 1 , wherein the spacing between said endcone and said second electrode is between about 1 to 10 mm.
10. The discharge source of claim 1 , wherein said endcone is configured to provide an electrical field between said endcone and said electrode.