Post-CMP treating liquid and method for manufacturing semiconductor device
View Patent ↗There is disclosed a post-CMP treating liquid comprising water, and resin particles dispersed in the water and having a functional group at a surface thereof, or comprising water, resin particles dispersed in the water, and an additive having a functional group and incorporated in the water. The post-CMP treating liquid exhibits a polishing rate both of an insulating film and a conductive film of 10 nm/min or less.
1. A method for manufacturing a semiconductor device comprising:
forming an insulating film above a semiconductor substrate;
forming a groove in the insulating film;
depositing a conductive film comprising a barrier metal film and a wiring material film on the insulating film;
subjecting said conductive film to a polishing treatment to expose the insulating film while selectively leaving the conductive film in the groove, thereby obtaining a polished surface, the polished surface including the insulating film, the barrier metal film and the wiring material film; and
treating said polished surface by using a treating liquid comprising water incorporating resin particles, wherein a polishing rate of each of the insulating film, the barrier metal film and the wiring material film by the treating liquid being 10 nm/mm or less.
2. The method according to claim 1 , wherein said insulating film is formed by forming a first insulating film having a relative dielectric constant of less than 2.5, and forming a second insulating film on the first insulating film, said second insulating film having a relative dielectric constant higher than that of said first insulating film.
3. The method according to claim 1 , wherein the resin particles comprises at least one selected from the group consisting of polymethylmethacrylate, polystyrene, polyethylene, polyethylene glycol, polyvinyl acetate, polybutadiene, polyisobutylene, polypropylene and polyoxymethylene.
4. The method according to claim 1 , wherein the primary particle diameter of said resin particles in said treating liquid is in the range of 10 nm to 5000 nm.
5. The method according to claim 1 , wherein a concentration of said resin particles in said treating liquid is in the range of 0.01 wt % to 20 wt %.
6. The method according to claim 1 , wherein said resin particles have a functional group on the surface thereof.
7. The method according to claim 6 , wherein the functional group comprises at least one selected from the group consisting of a carboxyl group, an amino group and a sulfonyl group.
8. The method according to claim 1 , wherein the treating liquid comprises an additive having a functional group.
9. The method according to claim 8 , wherein the functional group comprises at least one selected from the group consisting of a carboxyl group, an amino group and a sulfonyl group.