IP Library › Granted Patent US 6,824,652
Granted Patent Utility
US 6,824,652 · Confirmation No. 2708

SPUTTERING TARGET ASSEMBLY AND SPUTTERING APPARATUS USING THE SAME

Inventor: Jae Yeol Park
Patented Case View Patent ↗ View Publication ↗
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2005-04-22 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
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2004-07-16 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-07-16 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2004-07-16 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-07-16 FWCLM Index of Claims 1 View
2004-07-16 SRFW Search information including classification, databases and other search related notes 1 View
2004-06-21 A... Amendment/Request for Reconsideration-After Non-Final Rejection 3 View
2004-06-21 CLM Claims 3 View
2004-06-21 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2004-06-21 WFEE Fee Worksheet (SB06) 1 View
2004-03-26 CTNF Non-Final Rejection 9 View
2004-03-26 892 List of references cited by examiner 1 View
2004-03-26 FOR Foreign Reference 15 View
2004-03-26 FWCLM Index of Claims 1 View
2004-03-26 SRFW Search information including classification, databases and other search related notes 1 View
2004-03-22 SRNT Examiner's search strategy and results 3 View
2004-03-22 SRNT Examiner's search strategy and results 1 View
2004-03-15 ELC. Response to Election / Restriction Filed 3 View
2004-02-18 CTRS Requirement for Restriction/Election 5 View
2004-02-18 FWCLM Index of Claims 1 View
2002-12-30 TRNA Transmittal of New Application 3 View
2002-12-30 SPEC Specification 10 View
2002-12-30 CLM Claims 4 View
2002-12-30 ABST Abstract 1 View
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2002-12-30 OATH Oath or Declaration filed 2 View
2002-12-30 WFEE Fee Worksheet (SB06) 1 View
2002-12-30 WFEE Fee Worksheet (SB06) 1 View
2002-12-30 FRPR Certified Copy of Foreign Priority Application 16 View
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Quick Facts
Patent No.
US 6,824,652
App. No.
10/330,435
Filed
2002-12-30
Granted
2004-11-30
Pub. No.
US20030165639A1
Art Unit
1753
PTA
-2 days