IP Library › Granted Patent US 6,808,978
Granted Patent Utility
US 6,808,978 · Confirmation No. 1740

METHOD FOR FABRICATING METAL ELECTRODE WITH ATOMIC LAYER DEPOSITION (ALD) IN SEMICONDUCTOR DEVICE

Inventor: Younsoo Kim
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2015-11-26 IMIS Miscellaneous Internal Document 1 View
2013-06-27 IMIS Miscellaneous Internal Document 1 View
2004-07-28 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-06-29 XRUSH Internal Response to Printer Query from Technology Center(TC) 1 View
2004-06-16 RUSH Printer Query form, used by the publications branch 1 View
2004-05-13 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2004-05-13 NOA Notice of Allowance and Fees Due (PTOL-85) 1 View
2004-05-13 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2004-05-13 FWCLM Index of Claims 1 View
2004-05-13 SRFW Search information including classification, databases and other search related notes 1 View
2004-05-02 SRNT Examiner's search strategy and results 2 View
2004-02-25 WFEE Fee Worksheet (SB06) 1 View
2004-02-19 A... Amendment/Request for Reconsideration-After Non-Final Rejection 2 View
2004-02-19 CLM Claims 3 View
2004-02-19 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2003-11-20 CTNF Non-Final Rejection 10 View
2003-11-20 892 List of references cited by examiner 1 View
2003-09-02 ELC. Response to Election / Restriction Filed 2 View
2003-08-04 CTRS Requirement for Restriction/Election 4 View
2003-03-03 FRPR Certified Copy of Foreign Priority Application 22 View
2003-03-03 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2002-12-30 TRNA Transmittal of New Application 1 View
2002-12-30 SPEC Specification 11 View
2002-12-30 CLM Claims 4 View
2002-12-30 ABST Abstract 1 View
2002-12-30 DRW Drawings-only black and white line drawings 2 View
2002-12-30 OATH Oath or Declaration filed 1 View
2002-12-30 LET. Miscellaneous Incoming Letter 1 View
2002-12-30 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2002-12-30 SRFW Search information including classification, databases and other search related notes 1 View
2002-12-30 FWCLM Index of Claims 1 View
2002-12-30 TRNA Transmittal of New Application 1 View
2002-12-30 DRW Drawings-only black and white line drawings 2 View
2002-12-30 SPEC Specification 12 View
2002-12-30 CLM Claims 3 View
2002-12-30 ABST Abstract 1 View
2002-12-30 OATH Oath or Declaration filed 1 View
2002-12-30 WFEE Fee Worksheet (SB06) 1 View
2002-12-30 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
Patent No.
US 6,808,978
App. No.
10/330,436
Filed
2002-12-30
Granted
2004-10-26
Pub. No.
US20030201541A1
Examiner
VU, HUNG K
Art Unit
2811
PTA
0 days