Resins for resists and chemically amplifiable resist compositions
View Patent ↗A resist resin containing a monomer unit selected from the group comprising a monomer unit represented by Formula (II): wherein a substituent R 3 represents an alkyl group, or a functional group comprising an acid-deprotectable protecting group, m representing the number of R 3 is 0 (non-substitution), 1, 2 or more, R 3 may be different from each other, provided that m is 2 or more, and n represents an integer of 0 to 4, has no rough spots on the surface after etching and so has good dry etching resistance, and therefore the resist resin is preferably used as a photo resist for DUV.
1. A resist resin capable of being solubilized in an alkaline solution by the action of an acid, comprising a monomer unit represented by the following formula (II):
wherein a substituent R 3 represents an alkyl group, or a functional group comprising an acid-deprotectable protecting group, m representing the number of R 3 is 0 (non-substitution), 1, 2 or more, R 3 may be different from one another, provided that m is 2 or more, and
n represents an integer of 0 to 4;
a monomer unit having an alicyclic skeleton; and
a monomer unit having a lactone skeleton, excluding the monomer unit of Formula (II).
2. The resist resin according to claim 1 , wherein the monomer unit having an alicyclic skeleton is at least one type selected from the group consisting of cyclohexyl (meth)acrylate, isobornyl (meth)acrylate, adamantyl (meth)acrylate, tricyclodecanyl (meth)acrylate, dicyclopentadienyl (meth)acrylate, and derivatives having at least one substituent on the alicyclic rings.
3. The resist resin according to claim 2 , wherein the monomer unit having a lactone skeleton is at least one type selected from the group consisting of (meth)acrylate having a δ-valerolactone ring, (meth)acrylate having a γ-butyrolactone ring, derivatives having at least one substituent on the δ-valerolactone ring and derivatives having at least one substituent on the γ-butyrolactone ring.
4. The resist resin according to claim 2 , wherein the monomer unit having a lactone skeleton is at least one type selected from the group consisting of (meth)acrylate having a polycyclic lactone ring and derivatives having at least one substituent on the polycyclic lactone ring.
5. The resist resin according to claim 1 , wherein the monomer unit having a lactone skeleton is at least one type selected from the group consisting of (meth)acrylate having a δ-valerolactone ring, (meth)acrylate having a γ-butyrolactone ring, derivatives having at least one substituent on the δ-valerolactone ring and derivatives having at least one substituent on the γ-butyrolactone ring.
6. The resist resin according to claim 1 , wherein the monomer unit having a lactone skeleton is at least one type selected from the group consisting of (meth)acrylate having a polycyclic lactone ring and derivatives having at least one substituent on the polycyclic lactone ring.
7. A chemically amplified resist composition comprising the resist resin according to claim 1 and a photo acid generator.
8. A method of forming a pattern, comprising
applying the chemically amplified resist composition according to claim 7 on a substrate to be processed,
exposing said resist composition with an exposure source, and
developing said exposed resist composition.
9. The method of forming a pattern according to claim 8 , wherein the exposure source is selected from the group consisting of KrF excimer laser beam, ArF excimer laser beam, F 2 excimer laser beam and an electron beam.