Mobile plating system and method
View Patent ↗An exemplary method for using a mobile plating system is provided that includes locating the mobile plating system at a desired location for plating, positioning an external vacuum pump from an interior position of a mobile storage volume of the mobile plasma plating system to an exterior position, and coupling the external vacuum pump to a vacuum chamber within the mobile storage volume of the mobile plasma plating system using a flexible piping segment, rigid coupling with a dampening effect, or other arrangement operable to reduce and/or eliminate the mechanical vibrations within the vacuum chamber due to the operation of the external vacuum pump.
1. A method for using a mobile plasma plating system having a mobile storage volume, the method comprising:
locating the mobile plasma plating system at a desired location for plating wherein an external vacuum pump is stored in an interior storage position within the mobile storage volume during transportation of the mobile plasma plating system to the desired location for plating;
upon locating the mobile plasma plating system to the desired location for plating, positioning the external vacuum pump from the interior storage position within the mobile storage volume of the mobile plasma plating system to an exterior position outside of the mobile storage volume; and
coupling the external vacuum pump to a vacuum chamber within the mobile storage volume of the mobile plasma plating system using a flexible piping segment.
2. The method of claim 1 , further comprising:
placing a substrate and a depositant within the vacuum chamber;
establishing a desired pressure in the vacuum chamber using the external vacuum pump; and
plating the substrate with the depositant.
3. The method of claim 1 , wherein the vacuum chamber has an internal volume large enough to contain at least one reactor vessel head stud.
4. The method of claim 1 , wherein the external vacuum pump is mounted on a skid.
5. The method of claim 1 , wherein the external vacuum pump is a mechanical pump.
6. The method of claim 1 , wherein the external vacuum pump is a roughing pump.
7. The method of claim 1 , wherein the external vacuum pump includes a roughing pump and a foreline pump.
8. The method of claim 7 , wherein the roughing pump is a mechanical pump that couples with the vacuum chamber using a first flexible piping segment, and the foreline pump is a mechanical pump that couples with the vacuum chamber through a second flexible piping segment.
9. The method of claim 1 , further comprising:
an internal vacuum pump positioned within the mobile storage volume and operable to couple with the vacuum chamber to assist with producing a desired pressure in the vacuum chamber.