Process for efficient light extraction from light emitting chips
The present invention claims a unique way to pattern an optical microstructure immediately on top of a mass produced light-emitting device, such as a light emitting diode (LED), a vertical cavity surface emitting laser (VCSEL) or a photo detector, for the purpose of efficient coupling of light to or from the active region of the light-emitting device. The invention addresses the need to effectively and efficiently extract light from the light-emitting optoelectronic device. Finally, the invention allows for the optical microstructure to be deposited and patterned directly over the light-emitting device contained on a suitable substrate, such as a wafer.
1. A method of fabricating an optical microstructure on the top and/or bottom of a light-emitting device contained on a substrate, comprising providing a vertically tapered, 3-dimensionally-shaped microstructure of a spin-on-glass material on said light emitting device on said substrate by depositing said spin-on-glass material directly onto said light-emitting device on said substrate, wherein said spin-on-glass material is a hybrid glass/polymer sol-gel material capable of being processed at a temperature of less than 225 Degrees Centigrade, and thereby providing efficient collection of light that is coupled laterally out of said light emitting device.
2. The method of claim 1 , comprising fabricating said tapered microstructure on the bottom of said substrate using a back-side alignment photolithography method.
3. A method of fabricating an optical microstructure on the top and/or bottom of a light-emitting device contained on a substrate, comprising providing a vertically tapered, 3-dimensionally-shaped microstructure of a spin-on-glass material on said light emitting device on said substrate by depositing said spin-on-glass material directly onto said light-emitting device on said substrate, and further comprising coating said tapered microstructure with metal thereby providing increased reflectivity that increases the light extracted from said light emitting device.
4. A method of fabricating an optical microstructure on the top and/or bottom of a light-emitting device contained on a substrate, comprising providing a vertically tapered, 3-dimensionally-shaped microstructure of a spin-on-glass material on said light-emitting device on said substrate by depositing said spin-on-glass material directly onto said light-emitting device on said substrate, and further comprising shaping said tapered microstructures and thereby providing a lensing effect for efficient imaging or directing of the light.
5. A method of fabricating an optical microstructure on the top and/or bottom of a light-emitting device contained on a substrate, comprising providing a vertically tapered, 3-dimensionally-shaped microstructure of a spin-on-glass material on said light emitting device on said substrate by depositing said spin-on-glass material directly onto said light-emitting device on said substrate, further comprising depositing a spin-on glass material containing a phosphorescent material onto said substrate, thereby enabling the generation of white light or other colors.
6. The method of claim 1 , wherein said substrate is a wafer.
7. The method of claim 1 , wherein said light emitting device is a light-emitting diode, a vertical cavity surface emitting laser or a photo detector.
8. The method of claim 1 , wherein said light emitting device is a light-emitting diode.
9. The method of claim 1 , comprising depositing about 3–10 μm of said spin-on glass material onto a wafer.
10. The method of claim 1 , further comprising depositing a metal on said vertically tapered, 3-dimensionally-shaped microstructure.