Volatile copper(II) complexes for deposition of copper films by atomic layer deposition
View Patent ↗The present invention relates to novel 1,3-diimine copper complexes and the use of 1,3-diimine copper complexes for the deposition of copper on substrates or in or on porous solids in an Atomic Layer Deposition process. This invention also provides a process for making amino-imines and novel amino-imines.
1. A process for forming copper deposits on a substrate comprising:
a. contacting a substrate with a copper complex, (I), to form a deposit of the copper complex on the substrate; and
b. contacting the deposited copper complex with a reducing agent, wherein
R 1 and R 4 are independently selected from the group consisting of H, C 1 -C 5 alkyl, and dimethylamino;
R 2 and R 3 are independently selected from the group consisting of H, C 1 -C 5 alkyl, phenyl, benzyl, and 4-pyridinyl, with the proviso that the total number of carbons in R 1 -R 4 is 4-12; and
the reducing agent is selected from the group consisting of 9-BBN, borane, dihydrobenzofuran, pyrazoline, diethylsilane, dimethylsilane, ethylsilane, methylsilane, phenylsilane and silane.
2. The process of claim 1 , wherein R 1 , R 3 and R 4 are methyl and R 2 is phenyl.
3. The process of claim 1 , wherein the substrate is selected from the group consisting of copper, silicon wafers and silicon dioxide coated with a barrier layer.
4. The process of claim 1 , wherein the substrate is exposed to a vapor of the copper complex.
5. The process of claim 1 , wherein the deposition is carried out at 0 to 120° C.
6. The process of claim 1 , wherein the reducing agent is silane or diethylsilane.
7. A 1,3-diimine copper complex, (II),
wherein
R 5 and R 8 are dimethylamino; and
R 6 and R 7 are independently selected from the group consisting of H, C 1 -C 5 alkyl, phenyl, benzyl, and 4-pyridinyl, with the proviso that the total number of carbons in R 5 -R 8 is 4-14; or
R 5 and R 8 are independently selected from the group consisting of H, C 1 -C 5 alkyl, and dimethylamino; and
R 6 and R 7 are selected from the group consisting of H, C 1 -C 5 alkyl, phenyl, benzyl, and 4-pyridinyl, with the proviso that either R 6 or R 7 is 4-pyridinyl, and the proviso that the total number of carbons in R 5 -R 8 is 4-14.