Granted Patent
Utility
US 6,750,614
· Confirmation No. 8797
PLASMA PROCESSING APPARATUS CAPABLE OF PERFORMING UNIFORM PLASMA TREATMENT BY PREVENTING DRIFT IN PLASMA DISCHARGE CURRENT
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2008-08-18 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2008-08-18 | N570 |
Communication - Re: Power of Attorney (PTOL-308) | 1 | View | |
| 2008-08-07 | PA.. |
Power of Attorney | 1 | View | |
| 2008-08-07 | R3.73 |
Assignee showing of ownership per 37 CFR 3.73 | 1 | View | |
| 2008-08-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2004-03-16 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-03-16 | OATH |
Oath or Declaration filed | 1 | View | |
| 2004-02-18 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 6 | View | |
| 2004-02-18 | 892 |
List of references cited by examiner | 1 | View | |
| 2004-02-18 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-02-18 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-02-18 | FWCLM |
Index of Claims | 1 | View | |
| 2004-02-18 | CLM |
Claims | 5 | View | |
| 2004-02-08 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2004-01-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-12-12 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 2 | View | |
| 2003-12-12 | CLM |
Claims | 5 | View | |
| 2003-12-12 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2003-10-08 | CTNF |
Non-Final Rejection | 7 | View | |
| 2003-10-08 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-10-08 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-01-21 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-01-21 | SPEC |
Specification | 27 | View | |
| 2003-01-21 | CLM |
Claims | 4 | View | |
| 2003-01-21 | ABST |
Abstract | 1 | View | |
| 2003-01-21 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2003-01-21 | OATH |
Oath or Declaration filed | 3 | View | |
| 2003-01-21 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-01-21 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-01-21 | FWCLM |
Index of Claims | 1 | View | |
| 2003-01-21 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-01-21 | DRW |
Drawings-only black and white line drawings | 12 | View | |
| 2003-01-21 | SPEC |
Specification | 27 | View | |
| 2003-01-21 | CLM |
Claims | 4 | View | |
| 2003-01-21 | ABST |
Abstract | 1 | View | |
| 2003-01-21 | OATH |
Oath or Declaration filed | 3 | View | |
| 2003-01-21 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-01-21 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-01-21 | FRPR |
Certified Copy of Foreign Priority Application | 22 | View | |
| 2003-01-21 | FRPR |
Certified Copy of Foreign Priority Application | 31 | View | |
| 2003-01-21 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View |
Inventors
Akira Nakano
Miyagi-ken, JAPAN
Tadahiro Ohmi
Miyagi-ken, JAPAN
Attorneys & Agents of Record
Classification
USPC
315/111.21
H01J37/32174
H01J37/32082
Prosecution
- Examiner
- VU, JIMMY T
- Art Unit
- 2821
- Customer No.
- 58766
- Docket No.
- ALPSP102
- Confirmation No.
- 8797
Foreign Priority
2002-016035
·
2002-01-24
·
JAPAN
2002-022322
·
2002-01-30
·
JAPAN
Publication
- Pub. No.
- US20030137249A1
- Pub. Date
- 2003-07-24
Patent Term Adjustment
0days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-01-21
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Quick Facts
- Patent No.
- US 6,750,614
- App. No.
- 10/348,934
- Filed
- 2003-01-21
- Granted
- 2004-06-15
- Pub. No.
- US20030137249A1
- Examiner
- VU, JIMMY T
- Art Unit
- 2821
- PTA
- 0 days
External Links