Granted Patent
Utility
US 6,792,889
· Confirmation No. 1834
PLASMA PROCESSING APPARATUS AND METHOD CAPABLE OF PERFORMING UNIFORM PLASMA TREATMENT BY CONTROL OF EXCITATION POWER
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Code | Description | Pages | ||
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| 2004-07-08 | IFEE |
Issue Fee Payment (PTO-85B) | 1 | View | |
| 2004-07-08 | OATH |
Oath or Declaration filed | 1 | View | |
| 2004-06-16 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 3 | View | |
| 2004-06-16 | NOA |
Notice of Allowance and Fees Due (PTOL-85) | 4 | View | |
| 2004-06-16 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2004-06-16 | FWCLM |
Index of Claims | 1 | View | |
| 2004-06-16 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2004-06-13 | SRNT |
Examiner's search strategy and results | 2 | View | |
| 2004-05-13 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-05-13 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2004-05-13 | FWCLM |
Index of Claims | 1 | View | |
| 2004-04-22 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2004-04-22 | CLM |
Claims | 4 | View | |
| 2004-04-22 | REM |
Applicant Arguments/Remarks Made in an Amendment | 3 | View | |
| 2004-04-22 | LET. |
Miscellaneous Incoming Letter | 1 | View | |
| 2003-12-19 | CTNF |
Non-Final Rejection | 6 | View | |
| 2003-12-19 | 892 |
List of references cited by examiner | 1 | View | |
| 2003-12-19 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2003-12-15 | SRNT |
Examiner's search strategy and results | 1 | View | |
| 2003-12-14 | SRNT |
Examiner's search strategy and results | 3 | View | |
| 2003-01-28 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-01-28 | SPEC |
Specification | 32 | View | |
| 2003-01-28 | CLM |
Claims | 6 | View | |
| 2003-01-28 | ABST |
Abstract | 1 | View | |
| 2003-01-28 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2003-01-28 | OATH |
Oath or Declaration filed | 3 | View | |
| 2003-01-28 | IIFW |
Issue Information including classification, examiner, name, claim, renumbering, etc. | 1 | View | |
| 2003-01-28 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2003-01-28 | FWCLM |
Index of Claims | 1 | View | |
| 2003-01-28 | TRNA |
Transmittal of New Application | 2 | View | |
| 2003-01-28 | DRW |
Drawings-only black and white line drawings | 9 | View | |
| 2003-01-28 | SPEC |
Specification | 32 | View | |
| 2003-01-28 | CLM |
Claims | 6 | View | |
| 2003-01-28 | ABST |
Abstract | 1 | View | |
| 2003-01-28 | OATH |
Oath or Declaration filed | 3 | View | |
| 2003-01-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-01-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2003-01-28 | FRPR |
Certified Copy of Foreign Priority Application | 24 | View | |
| 2003-01-28 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 2 | View | |
| 2003-01-28 | FRPR |
Certified Copy of Foreign Priority Application | 29 | View |
Inventors
Akira Nakano
Miyagi-ken, JAPAN
Tadahiro Ohmi
Miyagi-ken, JAPAN
Attorneys & Agents of Record
Classification
USPC
118/723E
H10P50/242
H01J37/32082
H01J37/32183
Prosecution
- Examiner
- LEE, WILSON
- Art Unit
- 2821
- Customer No.
- 22434
- Docket No.
- ALPSP101
- Confirmation No.
- 1834
Foreign Priority
2002-022321
·
2002-01-30
·
JAPAN
2002-022323
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2002-01-30
·
JAPAN
Publication
- Pub. No.
- US20030141821A1
- Pub. Date
- 2003-07-31
Patent Term Adjustment
-109days
No related applications found.
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2003-01-28
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Quick Facts
- Patent No.
- US 6,792,889
- App. No.
- 10/353,760
- Filed
- 2003-01-28
- Granted
- 2004-09-21
- Pub. No.
- US20030141821A1
- Examiner
- LEE, WILSON
- Art Unit
- 2821
- PTA
- -109 days
External Links