Method and apparatus for altering the effective mode index of an optical waveguide
View Patent ↗An effective index modifier that modifies light propagation in a waveguide. The device is formed on a wafer, such as a Silicon-On-Insulator (SOI) wafer that includes an insulator layer and an upper silicon layer. A waveguide is formed at least in part in the upper silicon layer of the SOI wafer. The waveguide guides an optical signal by total internal reflection. At least one micro-mechanical system (MEMS) having at least one movable component is disposed a positive distance away from the waveguide. Application of voltage to the MEMS results in a variation of the distance between the moveable component and the waveguide, which in turn alters the effective index of the waveguide in a location proximate the moveable object, thereby resulting in modification of light propagation in the waveguide.
1. An effective mode index modifier that modifies light propagation in a waveguide, comprising:
a Silicon-On-Insulator (SOI) wafer that includes an insulator layer and an upper silicon layer;
a waveguide formed at least in part in the upper silicon layer of the SOI wafer, wherein the waveguide guides an optical signal by total internal reflection;
at least one micro-electro-mechanical system (MEMS) having at least one movable component disposed a positive distance away from the waveguide;
wherein application of voltage to the MEMS results in a variation of the distance between the at least one movable component and the waveguide, which in turn alters the effective mode index of the waveguide in a location proximate to the at least one movable component moveable object, thereby resulting in modification of light propagation in the waveguide.
2. The effective mode index modifier of claim 1 , wherein the at least one movable component is movable along a first axis that is normal to a plane of the wafer.
3. The effective mode index modifier of claim 1 , wherein the at least one movable component is movable throughout a second plane that is parallel to the plane of the wafer and perpendicular to the first axis.
4. The effective mode index modifier of claim 3 , wherein the at least one movable component is able to rotate about the first axis.
5. The effective mode index modifier of claim 3 , wherein the at least one movable component is able to rotate about a third axis that is perpendicular to the plane of the wafer.
6. The effective mode index modifier of claim 1 , wherein the at least one movable component has a shape that corresponds to a shape of a lens.
7. The effective mode index modifier of claim 6 , wherein the at least one movable component has a shape that corresponds to a prism.
8. The effective mode index modifier of claim 7 , wherein the at least one movable component is movable along a first axis that intersects said upper silicon layer.
9. An effective mode index modifier that modifies light propagation in a waveguide, comprising:
a wafer that includes an insulator layer and an upper silicon layer;
a waveguide formed at least in part in the upper silicon layer of the wafer, wherein the waveguide guides an optical signal by total internal reflection;
at least one micro-electro-mechanical system (MEMS) having at least one movable component, the at least one movable component disposed a positive distance away from the waveguide;
wherein application of voltage to the MEMS results in a variation of the distance between the at least one movable component and the waveguide, which in turn alters the effective mode index of the waveguide in a location proximate to the at least one movable component, thereby resulting in modification of light propagation in the waveguide.
10. A method for modifying light propagation in a waveguide, comprising the steps of:
providing a Silicon-On-Insulator (SOI) wafer that includes an insulator layer and upper silicon layer, and a waveguide formed at least in part in the upper silicon layer of the SOI wafer, wherein the waveguide guides an optical signal by total internal reflection, and at least one micro-electra-mechanical system (MEMS) having at least one movable component comprising a material having a refractive index less than the refractive index of silicon, the at least one movable component disposed a positive distance away from the waveguide; and
applying a voltage to the MEMS which results in a variation of the distance between the at least one movable component and the waveguide, which in turn alters an effective mode index of the waveguide in a location proximate to the at least one movable component, thereby resulting in modification of light propagation in the waveguide.
11. A method for modifying light propagation in a waveguide, comprising the steps of:
providing a wafer that includes an insulator layer and upper silicon layer, and a waveguide formed at least in part in the upper silicon layer of the SOI wafer, wherein the waveguide guides an optical signal by total internal reflection, and at least one micro-electra-mechanical system (MEMS) having at least one movable component disposed a positive distance away from the waveguide; and
applying a voltage to the MEMS which results in a variation of the distance between the at least one movable component and the waveguide, which in turn alters an effective mode index of the waveguide in a location proximate to the at least one movable component, thereby resulting in modification of light propagation in the waveguide.
12. The effective mode index modifier of claim 6 , wherein the at least one movable component has a shape that corresponds to a grating.