Passivation scheme for oxide vertical cavity surface-emitting laser
View Patent ↗A method for forming an oxide VCSEL (vertical cavity surface-emitting laser) includes forming a VCSEL structure, forming an oxidation cavity partially through the VCSEL structure, oxidizing a layer in the VCSEL structure, forming a first passivation layer over a surface of the oxidation cavity, and forming a second passivation layer over the first passivation layer. An oxide VCSEL structure includes a bottom mirror region, an active region atop the bottom mirror region, a top mirror region atop the active region, an oxidation cavity partially through the top mirror region, a first passivation layer covering a surface of the oxidation cavity, and a second passivation layer covering the first passivation layer. In both the method and the structure, the first passivation layer can be made of silicon nitride (SiN) while the second passivation layer can be made of silicon oxynitride (SiON).
1. A method for forming an oxide vertical cavity surface-emitting laser (VCSEL), comprising:
forming a VCSEL structure;
forming an oxidation cavity partially through the VCSEL structure;
oxidizing a layer in the VCSEL structure to define a lasing aperture;
depositing a first passivation layer over the oxidation cavity and the laser aperture;
etching away the first passivation layer over the laser aperture;
forming a metal contact about the laser aperture; and
forming a second passivation layer over the first passivation layer and the laser aperture of the VCSEL.
2. The method of claim 1 , wherein said forming a first passivation layer comprises depositing SiN over the surface of the oxidation cavity.
3. The method of claim 2 , wherein said forming a second passivation layer comprises depositing SiON over the first passivation layer.
4. The method of claim 3 , wherein said forming a second passivation layer occurs at a lower temperature than said forming a first passivation layer.
5. The method of claim 1 , wherein said forming a VCSEL structure comprises:
forming a bottom mirror region atop a wafer;
forming an active region atop the bottom mirror region; and
forming a top mirror region atop the active region.
6. An oxide vertical cavity surface-emitting laser (VCSEL), comprising:
a bottom mirror region;
an active region atop the bottom mirror region;
a top mirror region atop the active region;
an oxidation cavity partially through the top mirror region;
a first passivation layer covering a surface of the oxidation cavity;
a metal contact about a laser aperture; and
a second passivation layer covering the first passivation layer and the laser aperture of the VCSEL.
7. The VCSEL of claim 6 , wherein the first passivation layer comprises SiN.
8. The VCSEL of claim 6 , wherein the second passivation layer comprises SiON.
9. A method for forming an oxide vertical cavity surface-emitting laser (VCSEL), comprising:
forming a VCSEL structure;
forming an oxidation cavity partially through the VCSEL structure;
oxidizing a layer in the VCSEL structure;
forming a first passivation layer over a surface of the oxidation cavity; and
forming a second passivation layer over the first passivation layer, wherein said forming a second passivation layer occurs at a lower temperature than said forming a first passivation layer.