Microwave spectrometer

1. A microwave spectrometer which measures the concentration of an ethylene oxide gas and the concentration of water vapor in one or more gas samples taken from a sterilization chamber, said microwave spectrometer, in combination, comprising:

a first microwave generator which generates microwaves at the absorption frequency of an ethylene oxide gas molecule;

a second microwave generator, which generates microwaves at the absorption frequency of a water vapor molecule;

a tuning cavity, which modulates microwave frequencies generated by said first and second microwave generators to exact absorption frequencies of an ethylene oxide gas molecule and a water vapor molecule;

a first detector that measures microwaves at the absorption frequency of an ethylene oxide gas molecule;

a second detector that measures microwaves at the absorption frequency of a water vapor molecule; and

wherein the microwave spectrometer measures the concentration of an ethylene oxide gas and the concentration of water vapor in one or more gas samples by alternatively generating and detecting microwaves having absorption frequencies of an ethylene oxide gas and water vapor.

2. The microwave spectrometer of claim 1 , further comprising a control system connected to the first microwave generator, the second microwave generator, the first detector and the second detector.

3. The microwave spectrometer of claim 1 , wherein said tuning cavity and the second microwave generator generates microwaves at the exact absorption frequencies of a water molecule of 22.235 gigahertz.

4. The microwave spectrometer of claim 1 , wherein said tuning cavity and the first microwave generator generates microwaves at the exact absorption frequencies of an ethylene oxide gas molecule of 23.134 gigahertz.

5. A method of measuring the concentration of an ethylene oxide gas and the concentration of water vapor in one or more gas samples taken from a sterilization chamber in a microwave spectrometer comprising the following steps, in combination,

subjecting the gas sample(s) to a first set of microwaves generated at the absorption frequency of an ethylene oxide gas molecule;

subjecting the gas sample(s) to a second set of microwaves generated at the absorption frequency of a water vapor molecule;

detecting microwaves at the absorption frequency of an ethylene oxide gas molecule that pass through the gas sample(s); and

detecting microwaves at the absorption frequency of a water vapor molecule that pass through the gas sample(s); and

calculating the concentration of an ethylene oxide gas and the concentration of water vapor from the difference in the generated and detected microwaves.

6. The method of claim 5 , wherein the second set of microwaves generated are microwaves at the exact absorption frequencies of a water molecule of 22.235 gigahertz.

7. The method of claim 5 , wherein the first set of microwaves generated are microwaves at the exact absorption frequency of an ethylene oxide gas molecule of 23.134 gigahertz.

8. A microwave spectrometer which measures the concentration of an ethylene oxide gas and the concentration of water vapor in one or more gas samples taken from a sterilization chamber, said microwave spectrometer, in combination, comprising:

a first microwave generator which generates microwaves at the absorption frequency of an ethylene oxide gas molecule;

a second microwave generator which generates microwaves at the absorption frequency of a water vapor molecule;

a first circulator connected to the first microwave generator and to the second microwave generator;

a tuning cavity connected to the first circulator and to a second circulator;

a gas measurement cell connected the first circulator;

the second circulator connected to the gas measurement cell;

a first detector connected to the second circulator for measuring microwaves at the absorption frequency of an ethylene oxide gas molecule;

a second detector connected to the second circulator for measuring microwaves at the absorption frequency of a water vapor molecule; and

a control system connected to the first microwave generator, the second microwave generator, the tuning cavity, the second circulator, the first detector and the second detector,

wherein the microwave spectrometer measures the concentration of an ethylene oxide gas and the concentration of water vapor in one or more gas samples by alternatively generating, and tuning and detecting microwaves having absorption frequencies of an ethylene oxide gas molecule and a water vapor molecule.

9. The microwave spectrometer of claim 8 , which further includes an isolator connected to the third circulator and the gas measurement cell.

10. The microwave spectrometer of claim 9 , which further includes an attenuator connected to the isolator and the gas measurement cell.

11. The microwave spectrometer of claim 8 , which further includes a gas sampling apparatus which provides sample atmospheres having a known concentration of an ethylene oxide gas.

12. The microwave spectrometer of claim 8 , which further includes a gas sampling apparatus which provides sample atmospheres having a known concentration of water vapor.

13. The microwave spectrometer of claim 12 , wherein the gas sampling apparatus includes a water vapor calibration beaker and a relative humidity valve to calibrate said microwave spectrometer for measuring the exact concentration of water vapor.

14. The microwave spectrometer of claim 13 , wherein the calibration beaker includes a solution of water for producing water vapor having a known concentration, said water vapor having a certain desired percentage of relative humidity.

15. The microwave spectrometer of claim 14 , wherein the solution includes water and sodium chloride.

16. The microwave spectrometer of claim 8 , which further includes a third circulator connected to the first circulator and the gas measurement cell.

17. The microwave spectrometer of claim 8 , which further includes a gas sampling apparatus which provides a gas sample of an ethylene oxide gas from a sterilization chamber to the gas measurement cell.