Lot management production method and product carrying container

1. A container assembly for carrying a wafer product constituting a lot in a production line, said container assembly comprising:

at least two stackable container units, each unit having:

a top and a bottom opposite the top;

opposite lateral sides extending between an upper lateral edge adjacent said top and a corresponding lower lateral edge adjacent said bottom;

an upper attachment rail extending along each upper lateral edge of the container unit in a wafer insertion direction; and

a lower attachment rail extending along each lower lateral edge of the container unit in a wafer insertion direction;

wherein said top, said bottom, and said opposite lateral sides form an interior cavity;

wherein each lateral side includes an outer face and an inner face and each inner face is corrugated to form a vertical array of grooves extending in the wafer insertion direction; and

wherein each groove of each side is aligned with a corresponding groove of the opposing side and each set of opposing grooves forms a compartment configured to receive the waferproduct in the wafer insertion direction and hold the product; and

at least two connectors for releasably connecting the container units to each other, each of said connectors connecting an upper attachment rail of one of said container units to a corresponding lower attachment rail of another of said container units thereby forming the container assembly for carrying the wafer product in said production line;

wherein the compartment are uniformly spaced when said units are aggregated to each other and retained by said conductors.

2. A container assembly as set forth in claim 1 wherein each connector connects adjacent upper and lower container units by engaging a bottom surface and a lateral surface of the upper attachment rail of the lower container unit and a top surface and a lateral surface of the lower attachment rail of the upper container unit.

3. A container assembly as set forth in claim 1 wherein each of the wafer products is a semiconductor wafer, each of said container units is a wafer cassette, and said container units are adapted for use with a cluster chamber to process the semiconductor wafers.

4. A container assembly as set forth in claim 1 wherein adjacent container units directly contact each other and there are no intervening structures between them.

5. A container assembly as set forth in claim 1 wherein each connector has a C-shaped cross section.

6. A container assembly as set forth in claim 1 wherein each side is generally perpendicular to said top and said bottom and the bottom of an upper container unit of adjacent units directly contacts the top of a lower container unit of adjacent units when adjacent container units are connected to each other by said connecters.

7. A container assembly as set forth in claim 6 wherein the bottom of the upper container unit contiguously contacts the top of the lower container unit of the adjacent units between the adjacent units when adjacent container units are connected to each other by said connecters.

8. A container assembly as set forth in claim 2 wherein said bottom surface of each upper attachment rail is generally perpendicular to the corresponding lateral surface of that upper attachment rail and said upper surface of each lower attachment rail is generally perpendicular to the corresponding lateral surface of that lower attachment rail.

9. A container assembly as set forth in claim 5 wherein each C-shaped connecter includes four parts connected to form four generally right angles.

10. A container assembly for carrying a plurality of single lots including wafers to be processed in a production line, said container assembly comprising:

a plurality of detachable units for carrying the lots, each unit including a body, at least one compartment for holding at least one wafer, at least two upper attachment rails extending along opposite upper lateral edges of each unit in a wafer insertion direction, and at least two lower attachment rails extending along opposite lower lateral edges of the unit in the wafer insertion direction, each of said upper attachment rails and each of said lower attachment rails having an L-shaped cross section; and

a plurality of connectors for connecting adjacent units of said detachable units when the units are assembled with each other;

wherein each connector has a C-shaped cross section; wherein each of the wafers is a semiconductor wafer, each of said units is a wafer cassette, and said units are adapted for use with a cluster chamber to process the semiconductor wafers.

11. A container assembly as set forth in claim 10 wherein each connector connects adjacent units by engaging the upper rails of an lower unit of adjacent units and the lower rails of a corresponding upper unit of each pair of adjacent units.

12. A container assembly as set forth in claim 11 wherein each connector connects adjacent upper and lower units by engaging a bottom surface and a lateral surface of the upper attachment rail of the lower unit and a top surface and a lateral surface of the lower attachment rail of the upper unit.

13. A container assembly as set forth in claim 10 wherein each container unit includes a plurality of compartments, each compartment being configured to receive and hold one of said wafers, and the compartments are uniformly spaced when said detachable units are aggregated to each other and retained by the connector.

14. A container assembly as set forth in claim 10 wherein each C-shaped connecter includes four parts connected to each other to form four generally right angles.

15. A container assembly as set forth in claim 12 wherein said bottom surface of each upper attachment rail is generally perpendicular to the corresponding lateral surface of that upper attachment rail and said upper surface of each lower attachment rail is generally perpendicular to the corresponding lateral surface of that lower attachment rail.