System for using a two part cover for protecting a reticle
View Patent ↗A system and method are used to protect a mask from being contaminated by airborne particles. They include providing a reticle secured in a two-part cover. The two part cover includes a removable protection device used to protect the reticle from contaminants. The cover can be held inside a pod or box that can be used to transport the cover through a lithography system from an atmospheric section to a vacuum section. While in the vacuum section, the removable cover can be moved during an exposure process during which a pattern on the reticle can be formed on a wafer.
1. A system comprising:
a box that holds a mask that is removeably secured to a device with a separable lid;
a first portion containing filtered air at substantially first portion pressure;
an first portion manipulator that moves the box within the first portion;
a de-podder used to transition the mask between the first portion and a gas mini-environment portion, the mini-environment portion being purged with clean gas at substantially first portion pressure and having a mini-environment manipulator that moves the box within the mini-environment portion;
a loadlock that is used to transition the mask between the mini-environment portion and a vacuum portion; and
a vacuum manipulator that moves the mask within the vacuum portion.
2. The system of claim 1 , wherein the first portion manipulator places the box on the de-podder and removes the box from the de-podder.
3. The system of claim 1 , wherein the mini-environment manipulator moves the mask within the gas mini-environment portion, removes the mask from the de-podder, places the mask inside the loadlock, and that removes a mask from inside the loadlock.
4. The system of claim 1 , wherein the filtered air environment portion comprises one or more of:
an elevator that accepts the box from a box input height beyond the reach of the first portion manipulator and that vertically moves the box to within reach of the first portion manipulator;
an identification station that reads an ID mark or a smart tag encoded on the box; and
a storage rack that temporarily stores the box.
5. The system of claim 1 , wherein the gas mini-environment portion comprises at least one of:
an identification station that reads an ID mark encoded on the mask;
a thermal conditioning station that equalizes the temperature of an incoming mask to a pre-determined processing temperature;
a mask inspection station that detects contaminants on a surface of the mask;
a mask cleaning station that removes contaminants from the surface of the mask; and
a mask orienting station that orients the mask relative to the system.
6. The system of claim 1 , wherein the gas mini-environment is purged with a gas selected from the group consisting of filtered dry air, synthetic air, a mix of dry nitrogen and dry oxygen, and dry nitrogen.
7. The system of claim 1 , wherein the vacuum portion comprises at least one of:
an identification station that reads an ID mark encoded on the mask;
a library that at least temporarily stores at least the mask;
a thermal conditioning station that equalizes the temperature of the mask to a pre-determined processing temperature;
a mask inspection station that detects contaminants on a surface of the mask;
a mask cleaning station that removes contaminants from the surface of the mask;
a mask orienting station that orients the mask relative to the system; and
a processing station that processes the mask.
8. The system of claim 7 , wherein the processing station is used to photolithographically reproduce a pattern on a surface of the mask onto a photoresist-coated wafer using light.
9. The system of claim 8 , wherein a wavelength of the light corresponds to an extreme ultraviolet portion of the spectrum.
10. The system of claim 8 , wherein a wavelength of the light is between about 10 nanometers and about 15 nanometers.
11. The system of claim 8 , wherein a wavelength of the light is about 13 nanometers.
12. A system comprising:
a first portion having a first portion manipulator that moves a box within the first portion, wherein the box holds a mask that is removeably secured to a device with a separable lid;
a de-podder portion that transitions the mask between the first portion and a gas mini-environment portion, the mini-environment portion having a mini-environment manipulator that moves the box within the mini-environment portion;
a loadlock portion positioned between the mini-environment portion and a vacuum portion, and through which the mask is transitioned.
13. The system of claim 12 , wherein the first portion manipulator places the box on the de-podder and removes the box from the de-podder.
14. The system of claim 12 , wherein the mini-environment manipulator moves the mask within the gas mini-environment portion, removes the mask from the de-podder, places the mask inside the loadlock, and removes a mask from inside the loadlock.
15. The system of claim 12 , wherein the first portion comprises one or more of:
an elevator that accepts the box from a box input height beyond the reach of the first portion manipulator and that vertically moves the box to within reach of the first portion manipulator;
an identification station that reads an ID mark or a smart tag encoded on the box; and
a storage rack that temporarily stores the box.
16. The system of claim 12 , wherein the gas mini-environment portion comprises at least one of:
an identification station that reads an ID mark encoded on the mask;
a thermal conditioning station that equalizes the temperature of an incoming mask to a pre-determined processing temperature;
a mask inspection station that detects contaminants on the mask;
a mask cleaning station that removes contaminants from the mask; and
a mask orienting station that orients the mask relative to the system.
17. The system of claim 12 , wherein the gas mini-environment is purged with a gas selected from filtered dry air, synthetic air, a mix of dry nitrogen and dry oxygen, or dry nitrogen.
18. The system of claim 12 , wherein the vacuum portion comprises at least one of:
an identification station that reads an ID mark encoded on the mask;
a library that at least temporarily stores the mask;
a thermal conditioning station that equalizes the temperature of the mask to a pre-determined processing temperature;
a mask inspection station that detects contaminants on the mask;
a mask cleaning station that removes contaminants from the mask;
a mask orienting station that orients the mask relative to the system; and
a processing station that processes the mask.
19. The system of claim 18 , wherein the processing station is used to lithographically produce a pattern from a surface of the mask onto a wafer.
20. The system of claim 18 , wherein a wavelength a wavelength used to lithographically produce the pattern comprises extreme ultraviolet light.
21. The system of claim 18 , is between about 10 nanometers and about 15 nanometers.
22. The system of claim 18 , wherein a wavelength a wavelength used to lithographically produce the pattern is about 13 nanometers.