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US 6,768,930 · Confirmation No. 6877

METHOD AND APPARATUS FOR RESOLVING CONFLICTS IN A SUBSTRATE PROCESSING SYSTEM

Inventor: Hilario Oh
Patented Case View Patent ↗ View Publication ↗
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 Code Description Pages PDF
2009-09-01 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-09-01 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2009-08-31 TRAN.LET Transmittal Letter 1 View
2009-08-31 PA.. Power of Attorney 1 View
2009-08-31 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2009-08-31 N417 Electronic Filing System Acknowledgment Receipt 2 View
2004-05-19 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-05-19 PA.. Power of Attorney 4 View
2004-05-19 LET. Miscellaneous Incoming Letter 2 View
2004-05-19 DRW Drawings-only black and white line drawings 14 View
2003-02-18 TRNA Transmittal of New Application 2 View
2003-02-18 SPEC Specification 40 View
2003-02-18 CLM Claims 3 View
2003-02-18 ABST Abstract 1 View
2003-02-18 DRW Drawings-only black and white line drawings 13 View
2003-02-18 OATH Oath or Declaration filed 2 View
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Quick Facts
Patent No.
US 6,768,930
App. No.
10/370,138
Filed
2003-02-18
Granted
2004-07-27
Pub. No.
US20030154001A1
Art Unit
3651
PTA
0 days