Isolation technique for pressure sensing structure
View Patent ↗An electronic pressure-sensing device is isolated from corrosive, conductive gasses and fluids by a corrosion resistant metal diaphragm welded to a pressure port. The pressure-sensing device is attached to a support structure with a hole that provides a path from the diaphragm area to the pressure-sensing device. A fill fluid is sealed behind the diaphragm and fills the hole through the support structure to the electronic pressure-sensing device. In this design, any hostile chemical applied is completely isolated from the electronic sensor and associated adhesive seals by the metal diaphragm.
1. A pressure sensor comprising:
a plate having a hole therein;
a pressure sensing die mounted to said plate, said pressure sensing die comprising a diaphragm in fluid communication with said hole, said diaphragm comprising a pressure sensitive electrical element formed in or on said diaphragm;
a cap glass-flit bonded to said pressure sensing die such that a cavity is formed between said cap and said diaphragm, wherein said pressure sensitive elecirical element provides an indication of the difference between the pressure on each side of the diaphragm.
2. Sensor of claim 1 wherein said cavity contains a vacuum.
3. Sensor of claim 1 wherein said cap and die are made from the same material.
4. Sensor of claim 1 wherein said cap and die comprise silicon.
5. Sensor of claim 1 wherein said element comprises a capacitor.
6. Sensor of claim 1 wherein said element comprises a resistor.
7. Sensor of claim 1 wherein glass fit serves as an adhesive bond for bonding said cap to said pressure sensing die.
8. Sensor of claim 7 wherein said cap is bonded directly to said pressure sensing die with said glass frit.
9. Sensor of claim 1 wherein said cap comprises a top and side walls extending from said top toward said die, the bottom of said side walls being glass-fit bonded to said die.
10. Sensor of claim 1 further comprising a support structure provided between said die and said plate, said support structure having a hole therein in fluid communication with the hole in said plate.
11. A method for making a pressure sensor comprising:
providing a pressure sensing die comprising a diaphragm, said diaphragm comprising a pressure sensitive electrical element formed therein;
glass-fit bonding a cap to said pressure sensing die such that a cavity is formed between said cap and said diaphragm;
mounting said pressure sensing die on a plate having a hole therein such that said diaphragm is in fluid communication with said hole, wherein said pressure sensitive electrical element provides an indication of the difference between the pressure on each side of the diaphragm.
12. Method of claim 11 wherein glass frit serves as an adhesive bond for bonding said cap to said pressure sensing die.
13. Method of claim 11 wherein said cap is bonded directly to said pressure sensing die with said glass frit.
14. Method of claim 11 wherein said cap comprises a top and side walls extending from said top toward said die, the boffom of said aide walls being glass-frit bonded to said die.
15. Method of claim 1 further comprising providing a support structure between said die and said plate, said support structure having a hole therein in fluid communication with the hole in said plate.