Fabrication method for liquid crystal cell
View Patent ↗A liquid crystal cell fabrication method is presented that utilizes a deposited metal gasket moisture barrier bonding two opposing plates of glass each having a spacer layer to accurately control cell gap thickness along with an optional integrated thermal sensor and heater deposition layer sandwiched between both opposing plates of glass.
1. A method of fabricating a liquid crystal cell, comprising the steps of:
a) providing a first and second substrate,
b) depositing electrode layers on the first and second substrates,
c) depositing alignment layers on the first and second substrates,
d) anchoring the alignment layers,
e) depositing thin film spacer elements on at least one of the first and second substrates,
f) depositing thin film metal gasket elements on the first and second substrates, the combined thickness of an opposing pair of metal gasket elements being greater than the thickness of the spacer elements,
g) aligning the first and second substrates, and
h) applying external pressure to the first and second substrates, such that they are pressed together to a separation determined by the spacer elements,
wherein the metal gasket element is formed to include at least one VIA enabling interconnection between features deposited on the first and second substrates.
2. The method of claim 1 wherein step g) is performed using interlocking alignment features.
3. The method of claim 1 , further including the steps:
i) dicing the aligned and pressed-together substrates into dies,
j) scoring a die to form a ledge,
k) removing the ledge from the die, and
l) filling the liquid crystal cell with liquid crystal material.
4. The method of claim 2 , wherein the interlocking alignment features are deposited on each substrate in step e or f.
5. The method of claim 1 , comprising the step of forming a thermal element on at least one of the first and second substrates, and wherein the at least one VIA enables connection to the thermal element.
6. The method of claim 5 , comprising the step of forming a temperature sensor on at least one of the first and second substrates, and wherein the at least one VIA enables connection to the temperature sensor.
7. The method of claim 1 , comprising the step of integrating an optical element onto at least one of the first and second substrates.
8. The method of claim 7 , wherein the optical element is any one of a polarizer, beam splitter, filter, waveguide, waveplate, combiner, mirror, partially transparent mirror, isolator, detector, grating, subwavelength grating or nanostructure.