Recording/reproducing separated magnetic head with concave portion formed in air bearing protective film
View Patent ↗Protrusion of head elements to an air bearing surface is effectively reduced and their contact with a recording medium is thereby prevented by forming a level gap (concave) of about 3 nm in a multilayered protective film on the air bearing surface in a part matching an inductive write thin film head in a recording/reproducing separated type magnetic head and thereby offsetting protrusion of the head elements to the air bearing surface due to thermal deformation of the heads.
1. A recording/reproducing separated type magnetic head comprising:
a magnetoresistive head;
an inductive write thin film head arranged adjacent to said magnetoresistive head, having a lower magnetic film, an upper magnetic film and a write gap film and coils both arranged between said lower magnetic film and said upper magnetic film;
a protective film formed in an upper part of said inductive write thin film head;
an air bearing surface protective film formed over air bearing surfaces of said magnetoresistive head and inductive write thin film head; and
a first concave portion formed in said air bearing surface protective film in a part matching said inductive write thin film head.
2. The recording/reproducing separated type magnetic head according to claim 1 , wherein said air bearing surface protective film is a carbon film.
3. The recording/reproducing separated type magnetic head according to claim 1 , wherein said air bearing surface protective film is formed of a multilayered film of at least two layers and said first concave portion is formed by removing an upper layer of said multilayered film.
4. The recording/reproducing separated type magnetic head according to claim 1 , wherein said air bearing surface protective film is a multiple layer of a silicon film and a carbon film, and said first concave portion is formed by removing said carbon film.
5. The recording/reproducing separated type magnetic head according to claim 4 , wherein an angled portion of said protective film, formed in the upper part of said inductive write thin film head, toward the air bearing surface has a second concave portion.
6. A recording/reproducing separated type magnetic head comprising:
a magnetoresistive head having a magnetoresistive film arranged between a lower shield film and an upper shield film provided over a substrate, and electrode films electrically connected to said magnetoresistive film;
an inductive write thin film head having a write gap film and coils arranged between a lower magnetic film and an upper magnetic film, both provided over said upper shield film of the magnetoresistive head with an insulating film in-between;
a protective film formed in an upper part of said inductive write thin film head;
an air bearing surface protective film formed over air bearing surfaces of said magnetoresistive head and inductive write thin film head; and
a first concave portion formed in said air bearing surface protective film in a part matching said upper magnetic film.
7. The recording/reproducing separated type magnetic head according to claim 6 , wherein said air bearing surface protective film is a carbon film.
8. The recording/reproducing separated type magnetic head according to claim 6 , wherein said air bearing surface protective film is formed of a multilayered film of at least two layers and said first concave portion is formed by removing an upper layer of said multilayered film.
9. The recording/reproducing separated type magnetic head according to claim 6 , wherein said air bearing surface protective film is a multiple layer of a silicon film and a carbon film, and said first concave portion is formed by removing said carbon film.
10. The recording/reproducing separated type magnetic head according to claim 9 , wherein an angled portion of said protective film, formed in the upper part of said inductive write thin film head, toward the air bearing surface has a second concave portion.
11. A recording/reproducing separated type magnetic head comprising:
a magnetoresistive head having a magnetoresistive film arranged between a lower shield film and an upper shield film provided over a substrate, and electrode films electrically connected to said magnetoresistive film;
an inductive write thin film head using said upper shield film of said magnetoresistive head also as a lower magnetic film and having a write gap film and coils arranged between said upper shield film-cum-lower magnetic film and an upper magnetic film provided over said upper shield film-cum-lower magnetic film;
a protective film formed in an upper part of said inductive write thin film head;
an air bearing surface protective film formed over air bearing surfaces of said magnetoresistive head and inductive write thin film head; and
a first concave portion formed in said air bearing surface protective film in a part matching said upper magnetic film of said inductive write thin film head.
12. The recording/reproducing separated type magnetic head according to claim 11 , wherein said air bearing surface protective film is a carbon film.
13. The recording/reproducing separated type magnetic head according to claim 11 , wherein said air bearing surface protective film is formed of a multilayered film of at least two layers and said first concave portion is formed by removing an upper layer of said multilayered film.
14. The recording/reproducing separated type magnetic head according to claim 11 , wherein said air bearing surface protective film is a multiple layer of a silicon film and a carbon film, and said first concave portion is formed by removing said carbon film.
15. The recording/reproducing separated type magnetic head according to claim 14 , wherein an angled portion of said protective film, formed in the upper part of said inductive write thin film head, toward the air bearing surface has a second concave portion.
16. A recording/reproducing separated type magnetic head comprising:
a magnetoresistive head having a magnetoresistive film arranged between a lower shield film and an upper shield film provided over a substrate, and electrode films electrically connected to said magnetoresistive film;
an inductive write thin film head having a write gap film and coils arranged between a lower magnetic film having a pole toward the air bearing surface and an upper magnetic film having a pole toward an air bearing surface, both provided over said upper shield film of said magnetoresistive head with an insulating film in-between;
a protective film formed in an upper part of said inductive write thin film head;
an air bearing surface protective film formed over the air bearing surfaces of said magnetoresistive head and inductive write thin film head; and
a first concave portion formed in said air bearing surface protective film in a part matching said upper magnetic film of inductive write thin film head.
17. The recording/reproducing separated type magnetic head according to claim 16 , wherein said air bearing surface protective film is a carbon film.
18. The recording/reproducing separated type magnetic head according to claim 16 , wherein said air bearing surface protective film is formed of a multilayered film of at least two layers and said first concave portion is formed by removing an upper layer of said multilayered film.
19. The recording/reproducing separated type magnetic head according to claim 16 , wherein said air bearing surface protective film is a multiple layer of a silicon film and a carbon film, and said first concave portion is formed by removing said carbon film.
20. The recording/reproducing separated type magnetic head according to claim 19 , wherein an angled portion of said protective film, formed in the upper part of said inductive write thin film head, toward the air bearing surface has a second concave portion.
21. The recording/reproducing separated type magnetic head according to claim 1 , wherein said concave portion is formed in said air bearing surface film in a part matching said upper magnetic film.
22. A recording/reproducing separated type magnetic head comprising:
a magnetoresistive head;
an inductive write thin film head arranged adjacent to said magnetoresistive head, having a lower magnetic film, an upper magnetic film and a write gap film and coils both arranged between said lower magnetic film and said upper magnetic film;
a protective film formed in an upper part of said inductive write thin film head;
an air bearing surface protective film formed over air bearing surfaces of said magnetoresistive head and inductive write thin film head; and
a first concave portion formed in said air bearing surface protective film in a part which is at a center of said inductive write thin film head in a width direction.