Method of forming substrate for fluid ejection device
View Patent ↗A method of forming an opening through a substrate having a first side and a second side opposite the first side includes extending spaced etch stops into the substrate from the first side, etching into the substrate between the spaced etch stops, and etching into the substrate from the second side toward the first side to the spaced etch stops. Etching into the substrate between the spaced etch stops includes forming a first portion of the opening and etching into the substrate to the spaced etch stops includes forming a second portion of the opening.
1. A method of forming an opening through a substrate having a first side and a second side opposite the first side, the method comprising:
extending spaced etch stops into the substrate from the first side;
etching into the substrate between the spaced etch stops, including forming a first portion of the opening; and
etching into the substrate from the second side toward the first side to the spaced etch stops, including forming a second portion of the opening,
wherein etching into the substrate and forming the second portion of the opening includes terminating the second portion of the opening with the spaced etch stops.
2. The method of claim 1 , wherein forming the first portion of the opening includes forming the first portion of the opening between the spaced etch stops, and wherein forming the second portion of the opening includes forming the second portion of the opening to the speed etch stops.
3. The method of claim 1 , wherein extending the spaced etch stops into the substrate includes forming spaced slots in the substrate from the first side and forming the spaced etch stops in the spaced slots.
4. The method of claim 3 , wherein forming the spaced slots in the substrate includes etching into the substrate from the first side.
5. The method of claim 4 , wherein etching into the substrate from the first side includes dry etching into the substrate.
6. The method of claim 5 , wherein dry etching into the substrate includes deep reactive ion etching into the substrate.
7. The method of claim 3 , wherein the substrate is formed of silicon, and wherein forming the spaced etch stops in the spaced slots includes disposing an etch resistant material in the spaced slots.
8. The method of claim 7 , wherein the etch resistant material includes one of an oxide, tungsten, oxi-nitride, and silicon nitride.
9. The method of claim 1 , wherein etching into the substrate and forming the first portion and the second portion of the opening includes anisotropically wet etching into the substrate.
10. The method of claim 1 , wherein etching into the substrate and forming the first portion of the opening includes etching into the substrate from the first side toward the second side between the spaced etch stops.
11. The method of claim 1 , wherein etching into the substrate and forming the first portion and the second portion of the opening includes simultaneously etching into the substrate from the first side toward the second side and into the substrate from the second side toward the first side.
12. The method of claim 1 , wherein etching into the substrate and forming the first portion and the second portion of the opening includes etching into the substrate from the first side toward the second side after etching into the substrate from the second side to the first side.
13. The method of claim 1 , wherein extending the spaced etch stops into the substrate includes orienting the spaced etch stops substantially perpendicular to the first side of the substrate.
14. The method of claim 1 , wherein extending the spaced etch stops into the substrate includes defining a maximum dimension of the first portion of the opening.
15. The method of claim 14 , wherein extending the spaced etch stops into the substrate further includes defining a minimum dimension of the second portion of the opening.
16. The method of claim 1 , wherein extending the spaced etch stops into the substrate includes defining substantially parallel sides of the first portion of the opening along the first side of the substrate.
17. The method of claim 1 , wherein extending the spaced etch stops into the substrate includes defining substantially parallel, staggered sides of the first portion of the opening along the first side of the substrate.
18. The method of claim 1 , wherein extending the spaced etch stops into the substrate includes extending a first plurality of etch stops into the substrate from the first side and extending a second plurality of etch stops spaced from the first plurality of etch stops into the substrate from the first side.
19. The method of claim 1 , wherein extending the spaced etch stops into the substrate includes extending a pair of spaced etch stops into the substrate from the first side and extending at least one etch stop into the substrate from the first side between the pair of spaced etch stops.
20. A method of forming a substrate for a fluid ejection device, the method comprising:
forming spaced slots in the substrate from a first side;
forming spaced etch stops in the spaced slots;
etching a first portion of a fluidic channel into the substrate between the spaced etch stops; and
etching a second portion of the fluidic channel into the substrate from a second side opposite the first side to the spaced etch stops.
21. The method of claim 20 , wherein forming the spaced slots in the substrate includes etching into the substrate from the first side.
22. The method of claim 21 , wherein etching into the substrate from the first side includes dry etching into the substrate.
23. The method of claim 22 , wherein dry etching into the substrate includes deep reactive ion etching into the substrate.
24. The method of claim 20 , wherein the substrate is formed of silicon, and wherein forming the spaced etch stops in the spaced slots includes disposing an etch resistant material in the spaced slots.
25. The method of claim 24 , wherein the etch resistant material includes one of an oxide, tungsten, oxi-nitride, and silicon nitride.
26. The method of claim 20 , wherein etching the first portion and the second portion of the fluidic channel into the substrate includes anisotropically wet etching into the substrate.
27. The method of claim 20 , wherein etching the first portion of the fluidic channel into the substrate includes etching the first portion of the fluidic channel into the substrate from the first side between the spaced etch stops.
28. The method of claim 20 , wherein etching the second portion of the fluidic channel into the substrate includes terminating the second portion of the fluidic channel with the spaced etch stops.
29. The method of claim 20 , wherein etching the first portion and the second portion of the fluidic channel into the substrate includes simultaneously etching the first portion of the fluidic channel into the substrate from the first side and the second portion of the fluidic channel into the substrate from the second side.
30. The method of claim 20 , wherein etching the first portion and the second portion of the fluidic channel into the substrate includes etching the first portion of the fluidic channel into the substrate from the first side after etching the second portion of the fluidic channel into the substrate from the second side.
31. The method of claim 20 , wherein forming the spaced slots in the substrate includes orienting the spaced slots substantially perpendicular to the first side of the substrate.
32. The method of claim 20 , wherein forming the spaced etch stops includes defining a maximum dimension of the first portion of the fluidic channel.
33. The method of claim 32 , wherein forming the spaced etch stops further includes defining a minimum dimension of the second portion of the fluidic channel.
34. The method of claim 20 , wherein forming the spaced slots in the substrate includes defining substantially parallel sides of the first portion of the fluidic channel along the first side of the substrate.
35. The method of claim 34 , further comprising:
forming a plurality of drop ejecting elements on the first side of the substrate, including arranging the drop ejecting elements in substantially parallel columns and following the substantially parallel sides of the first portion of the fluidic channel.
36. The method of claim 20 , wherein forming the spaced slots in the substrate includes defining substantially parallel, staggered sides of the first portion of the fluidic channel along the first side of the substrate.
37. The method of claim 36 , further comprising:
forming a plurality of drop ejecting elements on the first side of the substrate, including arranging the drop ejecting elements in substantially parallel, staggered columns and following the substantially parallel, staggered sides of the first portion of the fluidic channel.
38. The method of claim 20 , wherein forming the spaced slots in the substrate includes forming a first plurality of slots and a second plurality of slots spaced from the first plurality of slots in the substrate, and wherein forming the spaced etch stops includes forming a first plurality of etch stops in the first plurality of spaced slots and a second plurality of etch stops in the second plurality of spaced slots.
39. The method of claim 20 , wherein forming the spaced slots in the substrate includes forming a pair of spaced slots and at least one slot between the pair of spaced slots in the substrate, and wherein forming the spaced etch stops includes forming a pair of spaced etch stops in the pair of spaced slots and an etch stop in the at least one slot between the pair of spaced slots.