Plasma encapsulation for electronic and microelectronic components such as organic light emitting diodes
View Patent ↗Plasma encapsulation for electronic and microelectronic components such as OLEDs. The invention relates to a plasma encapsulation for electronic and microelectronic components such as OLEDs. However, a conventional standard plasma coating process is not used; instead, an especially gentle plasma coating process which does not cause any damage to sensitive components such as an OLED is used, such as the pulsed method or the “remote” or “after glow method.”
1. A component comprising:
a substrate,
an organic light-emitting diode disposed on the substrate, and
an encapsulation of the organic light emitting diode, wherein the encapsulation includes a first coating and a second coating, wherein the second coating comprises a vapor deposited metal coating, and wherein the first coating is closer to the organic light-emitting diode than the second coating.
2. The component of claim 1 , further comprising an additional coating produced by means of a conventional plasma process.
3. The component of claim 1 , further comprising a roof structure.
4. A process for encapsulating an electronic or microelectronic component, comprising:
operating a plasma source in a pulsed manner to generate plasma; and
depositing a coating from the generated plasma to encapsulate an organic light-emitting diode.
5. The process of claim 4 , wherein depositing comprises:
adding at least one hydrocarbon precursor for plasma deposition.
6. The process of claim 5 , wherein the at least one hydrocarbon precursor is one of ethylene and methane.
7. The process of claim 4 , wherein depositing comprises:
adding at least one precursor that has at least one unsaturated bond for plasma deposition.
8. The process of claim 4 , wherein depositing comprises:
adding at least one precursor that features at least one functional group that interacts with an adjacent coating.
9. The process of claim 4 , wherein depositing comprises:
adding at least one precursor that has at least one heteroatom for plasma deposition.
10. The process of claim 9 , wherein the at least one heteroatom is one of a nitrogen and a sulfur atom.
11. The process of claims 4 , further comprising:
forming one or more of a vapor-deposited metal coating, a conventional plasma coating and a roof structure.
12. The process of claim 4 , wherein operating the plasma source in a pulsed manner comprises:
pulsing the plasma source so that plasma is activated during approximately 20% of the entire duration of the encapsulation process.
13. The process of claim 4 , wherein depositing comprises:
adding at least one organic monomer precursor for plasma deposition.
14. The process of claim 13 , wherein the organic monomer has a boiling point at a pressure of 1 bar that is not higher than 300° C.
15. The process of claim 13 , wherein the at least one organic monomer precursor is selected from the group consisting of: amines, pyroles, sulfur fluorides and thiophenes.
16. A process for encapsulating an electronic or microelectronic component, comprising:
depositing a coating from plasma on an organic light-emitting diode, wherein the plasma is generated by means of an after glow process in which the plasma and the electronic or microelectronic component to be coated are spatially separated from one another.
17. The process of claim 16 , wherein the spatial distance between the plasma source and the component to be coated is approximately 40 cm.
18. The process of claim 16 , further comprising
pulsing the plasma source so that plasma is activated during approximately 20% of the entire duration of the encapsulation process.
19. The process of claim 16 , wherein depositing comprises:
adding at least one organic monomer precursor for plasma deposition.
20. The process of claim 19 , wherein the organic monomer has a boiling point at a pressure of 1 bar that is not higher than 300° C.
21. The process of claim 19 , wherein the at least one organic monomer precursor is selected from the group consisting of: amines, pyroles, sulfur fluorides and thiophenes.
22. The process of claim 16 , wherein depositing comprises:
adding at least one hydrocarbon precursor for plasma deposition.
23. The process of claim 22 , wherein the at least one hydrocarbon precursor is one of ethylene and methane.
24. The process of claim 16 , wherein depositing comprises:
adding at least one precursor that has at least one unsaturated bond for plasma deposition.
25. The process of claim 16 , wherein depositing comprises:
adding at least one precursor that features at least one functional group that interacts with an adjacent coating for plasma deposition.
26. The process of claim 16 , wherein depositing comprises:
adding at least one precursor that has at least one heteroatom for plasma deposition.
27. The process of claim 16 , wherein the at least one heteroatom is one of a nitrogen and a sulfur atom.
28. The process of claims 16 , further comprising:
forming one or more of a vapor-deposited metal coating, a conventional plasma coating and a roof structure.
29. A component comprising:
a substrate,
an organic light-emitting diode disposed on the substrate, and
a first coating that encapsulates the organic light emitting diode to substantially protect the organic light emitting diode against contact with a surrounding atmosphere and a second coating which comprises a vapor-deposited metal coating, wherein the first coating is closer to the organic light-emitting diode than the second coating.