Coating thickness control using surface features
View Patent ↗A uniform coating is provided using surface features. Multiple ridges or other shapes are fabricated near an area of interest to allow for uniform coating in between the ridges. Areas at either ends of the ridges are left open to allow for excess pooling of photoresist liquid and to aid in obtaining uniform coating. The photoresist liquid or other coating fluid is applied to the sample and spun dry. A soft-bake process is performed to evaporate remaining solvents. An element, such as a diffractive, refractive, or reflective grating structure, is then formed in the area of interest using the uniform photoresist coating.
1. A wafer, comprising:
at least one pre-existing surface feature out of the surface of the wafer, wherein the at least one pre-existing surface feature is a device element formed on the wafer and extending out of the surface of the wafer;
an area of interest, wherein the area of interest is an area of the wafer in which a precise device element is to be formed using a uniform photoresist coating;
a plurality of artificial surface features out of the surface of the wafer near the area of interest, wherein the plurality of artifical surface features are features formed on the wafer and extending out of the surface of the wafer and wherein the plurality of artificial surface features arc spaced such that surface tension forces cause the photoresist coating to be substantially uniform in the region of interest; and
at least one pooling area on the wafer, wherein the pooling area is a vacant area on the wafer without features extending out of the surface of the wafer such that there are no additional surface tension forces in the at least one pooling area.
2. The wafer of claim 1 , wherein the plurality of artificial surface features includes a plurality of ridges.
3. The wafer of claim 1 , wherein the area of interest is a grating region.
4. The wafer of claim 1 , wherein the at least one pooling area is located at the ends of the plurality of artificial surface features.
5. The wafer of claim 1 , wherein the plurality of artificial surface features are spaced based on a viscosity of the photoresist and a spin speed at which the wafer is to be spun to dry the photoresist.