HEAD UNIT FOR EJECTION APPARATUS AND EJECTION APPARATUS EQUIPPED THEREWITH; METHOD OF MANUFACTURING LCD DEVICE, ORGANIC EL DEVICE, ELECTRON EMISSION DEVICE, PDP DEVICE, ELECTROPHORETIC DISPLAY DEVICE, COLOR FILTER, AND ORGANIC EL; METHOD OF FORMING SPACER, METALLIC WIRING, LENS, RESIST, AND LIGHT DIFFUSION MEMBER

1. A head unit for an ejection apparatus, said ejection apparatus having:

a main carriage which moves relative to a workpiece;

a sub-carriage detachably held by said main carriage; and

a function liquid droplet ejection head mounted on said sub-carriage,

wherein said head unit comprises a piping joint disposed on said sub-carriage at a position away from said function liquid droplet ejection head, said piping joint connecting together an apparatus-side piping material communicated with a liquid supply tank provided in said ejection apparatus and a head-side piping material communicated with said function liquid droplet ejection head.

2. The head unit according to claim 1 , wherein said piping joint comprises:

a socket which is fixed to said sub-carriage and which has connected to one end thereof said head-side piping material through a coupling; and

a plug which is capable of being plugged into, and out of, a plug hole formed in an opposite end of said socket and which has connected thereto said apparatus-side piping material.

3. The head unit according to claim 2 , wherein a bottom surface of said plug hole is formed into a taper to suit a taper at a front end of said plug.

4. The head unit according to claim 2 , further comprising a plurality of O-rings for sealing the plug hole, said O-rings being fitted around a perimeter of said plug at a distance from each other in an axial direction of said plug.

5. An ejection apparatus comprising a head unit as set forth in claim 1 , wherein a relative scanning is carried out between said function liquid droplet ejection head into which a function liquid has been introduced and a substrate which is a workpiece, and wherein the function liquid is selectively ejected during the scanning.

6. A method of manufacturing a liquid crystal display device in which a filter element is formed on a substrate of a color filter by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing a filter material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the substrate through said head unit for said ejection apparatus; and

selectively ejecting the filter material to thereby form the filter element.

7. A method of manufacturing an organic EL device in which an EL light emitting layer is formed on a pixel on the substrate by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing a light emitting material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the substrate through said head unit for said ejection apparatus; and

selectively ejecting the light emitting material to thereby form the EL light emitting layer.

8. A method of manufacturing an electron emission device in which a fluorescent member is formed on an electrode by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing a fluorescent material of each color into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the electrode through said head unit for said ejection apparatus; and

selectively ejecting the fluorescent material to thereby form the fluorescent member.

9. A method of manufacturing a PDP device in which a fluorescent member is formed in a recessed portion of a back substrate by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing a fluorescent material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the back substrate through said head unit for said ejection apparatus; and

selectively ejecting the fluorescent material to thereby form the fluorescent member.

10. A method of manufacturing an electrophoretic display device in which an electrophoretic member is formed in a recessed portion of an electrode by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing an electrophoretic material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the electrode through said head unit for said ejection apparatus; and

selectively ejecting the electrophoretic material to thereby form the electrophoretic member.

11. A method of manufacturing a color filter in which a color filter is formed by arraying filter elements on a substrate by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing a filter material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the substrate through said head unit for said ejection apparatus; and

selectively ejecting the filter material to thereby form the filter element.

12. The method according to claim 11 , in which an overcoat film to coat the filter element is formed, the method further comprising the steps of:

introducing, after forming the filter element, a translucent coating material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the substrate through said head unit for said ejection apparatus; and

selectively ejecting the coating material to thereby form the overcoat film.

13. A method of manufacturing an organic EL in which a pixel inclusive of an EL light emitting layer is arrayed on a substrate by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing a light emitting material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the substrate through said head unit for said ejection apparatus; and

selectively ejecting the light emitting material to thereby form the EL light emitting layer.

14. The method according to claim 13 , wherein a pixel electrode is formed between the EL light emitting layer and the substrate so as to correspond to the EL light emitting layer, said method further comprising the steps of:

introducing a liquid electrode material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the substrate through said head unit for said ejection apparatus; and

selectively ejecting the liquid electrode material to thereby form the pixel electrode.

15. The method according to claim 14 , in which an opposite electrode is formed to cover the EL light emitting layer, the method further comprising the steps of:

introducing, after forming the EL light emitting layer, a liquid electrode forming material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the substrate through said head unit for said ejection apparatus; and

selectively ejecting the liquid electrode material to thereby form the opposite electrode.

16. A method of forming a spacer in which a particulate spacer is constituted between two substrates so as to form a cell gap between two substrates by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing a particulate material which constitutes the spacer into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and at least one of the substrates through said head unit for said ejection apparatus; and

selectively ejecting the particulate material to thereby form the spacer on the substrate.

17. A method of forming a metallic wiring on a substrate by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing a liquid metallic material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the substrate through said head unit for said ejection apparatus; and

selectively ejecting the liquid metallic material to thereby form the metallic wiring.

18. A method of forming a lens in which a micro-lens is formed on a substrate by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing a lens material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the substrate through said head unit for said ejection apparatus; and

selectively ejecting the lens material to thereby form the micro-lens.

19. A method of forming a resist of an arbitrary shape on a substrate by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing a resist material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the substrate through said head unit for said ejection apparatus; and

selectively ejecting the resist material to thereby form the resist.

20. A method of forming a light diffusion member on a substrate by using the ejection apparatus as set forth in claim 5 , comprising the steps of:

introducing a light diffusion material into said function liquid droplet ejection head;

carrying out a relative scanning between said function liquid droplet ejection head and the substrate through said head unit for said ejection apparatus; and

selectively ejecting the light diffusion material to thereby form the light diffusion member.