Solution injector head, functional layer forming apparatus and liquid crystal display
View Patent ↗In a solution emitting head for emitting a solution through an outlet, having a main body including a cavity, a cover attached to the main body in such a manner that the cover covers the cavity to form a chamber so that the solution is stored in the chamber temporarily before being emitted from the outlet, and a solution pressurizing device for pressurizing the solution in the chamber, the cover is fixedly attached to the main body by one of metal-to-metal bonding and an adhesive dissolution-resistant against the solution between the cover and the main body.
1. A solution emitting head for emitting a solution through an outlet, comprising,
a main body including a cavity,
a cover attached to the main body in such a manner that the cover covers the cavity to form a chamber so that the solution is stored in the chamber temporarily before being emitted from the outlet, and
a solution pressurizing device for pressurizing the solution in the chamber to be discharged through the outlet from the chamber,
wherein the cover is fixedly attached to the main body by an adhesive dissolution-resistant against the solution between the cover and the main body, a main component of the cover is thermoplastic polyimide, and a part of the cover facing to the main body adheres as the adhesive to the main body, and another part of the cover facing to the chamber is deformable in such a manner that a volume of the chamber is decreased to pressurize the solution in the chamber.
2. A solution emitting head according to claim 1 , wherein the solution pressurizing device includes a piezoelectric element for urging the part of the cover to pressurize the solution in the chamber.
3. A solution emitting head according to claim 1 , wherein the solution includes a polar solvent, and the adhesive is dissolution-resistant against the polar solvent.
4. A solution emitting head according to claim 1 , wherein the solution includes at least one of soluble polyimide and poly-amic-acid as a material of a layer to be formed on a substrate of a liquid crystal display, and a polar solvent for solving the at least one of soluble polyimide and poly-amic-acid, and the polar solvent includes at least one of N-methyl-pyrrolidone, γ-butyrolactone and N-dimethylformamide.
5. An apparatus for forming a functional layer by emitting a solution as a material of the functional layer onto a substrate, comprising,
a solution emitting head for emitting the solution through an outlet of the solution emitting head, including, a main body including a cavity, a cover attached to the main body in such a manner that the cover covers the cavity to form a chamber so that the solution is stored in the chamber temporarily before being emitted from the outlet and a solution pressurizing device for pressurizing the solution in the chamber, wherein the cover is fixedly attached to the main body by an adhesive dissolution-resistant against the solution between the cover and the main body, a main component of the cover is thermoplastic polyimide, and a part of the cover facing to the main body adheres as the adhesive to the main body, and another part of the cover facing to the chamber is deformable in such a manner that a volume of the chamber is decreased to pressurize the solution in the chamber, and
a table adapted to hold the substrate thereon and movable with respect to the solution emitting head while the solution emitting head emits the solution onto the substrate so that the solution is distributed on the substrate to form the functional layer.