Magnetic recording medium and manufacturing method thereof
View Patent ↗A high-density magnetic recording medium uses a nonmetallic substrate, while still providing high in-plane magnetic anisotropy and remanent coercivity. Such a medium can be formed by depositing a seed layer on a textured surface of the nonmetallic substrate in a gas mixture containing oxygen or nitrogen and an inert gas, while controlling the oxygen concentration or nitrogen concentration, and subsequently exposing the surface of the seed layer to oxygen or nitrogen.
1. A method of manufacturing a magnetic recording medium, comprising the steps of:
texturing a surface of a nonmetallic substrate;
depositing a seed layer composed of Ni—P on the nonmetallic substrate;
exposing the surface of the seed layer to a gas containing at least one of oxygen or nitrogen;
depositing a nonmagnetic underlayer on the seed layer; and
depositing a magnetic layer on the nonmagnetic underlayer,
wherein the magnetic recording medium has an in-plane magnetic anisotropy of at least 1.30, and a remanent coercivity of at least 2800Oe,
wherein the seed layer composed of Ni—P is deposited on the nonmetallic substrate in a gas mixture containing oxygen and an inert gas, the concentration of oxygen being 0.15 to 0.55 vol %.
2. The method according to claim 1 , wherein the oxygen concentration in the gas mixture, when depositing the seed layer, is 0.20 to 0.45 vol %.
3. A method of manufacturing a magnetic recording medium, comprising the steps of:
texturing a surface of a nonmetallic substrate;
depositing a seed layer composed of W—Nb on the nonmetallic substrate;
exposing the surface of the seed layer to a gas containing at least one of oxygen or nitrogen;
depositing a nonmagnetic underlayer on the seed layer; and
depositing a magnetic layer on the nonmagnetic underlayer,
wherein the magnetic recording medium has an in-plane magnetic anisotrony of at least 1.30, and a remanent coercivity of at least 2800 Oe,
wherein the seed layer composed of W—Nb is deposited on the nonmetallic substrate in a gas containing a mixture of nitrogen and other inert gas, the concentration of nitrogen being 1.8 to 3.6 vol %.
4. The method according to claim 3 , wherein the nitrogen concentration in the gas mixture, when depositing the seed layer, is 1.8 to 2.7 vol %.
5. A method of manufacturing a magnetic recording medium, comprising the steps of:
texturing a surface of a nonmetallic substrate;
depositing a seed layer composed of Ni—Nb on the nonmetallic substrate;
exposing the surface of the seed layer to a gas containing at least one of oxygen or nitrogen;
depositing a nonmagnetic underlaver on the seed layer; and
depositing a magnetic layer on the nonmagnetic undertayer,
wherein the magnetic recording medium has an in-plane magnetic anisotropy of at least 1.30, and a remanent coercivity of at least 2800 Oe.
wherein the seed layer composed of Ni—Nb is deposited on the nonmetallic substrate in a gas mixture containing nitrogen and other inert gas, the concentration of nitrogen being 0.4 to 3.6 vol %.
6. The method according to claim 5 , wherein the nitrogen concentration in the gas mixture, when depositing the seed layer, is 0.4 to 0.9 vol %.
7. The method according to claim 1 , wherein the magnetic recording medium has an in-plane magnetic anisotropy of at least 1.50, and a remanent coercivity of at least 3500 Oe.
8. The method according to claim 3 , wherein the magnetic recording medium has an in-plane magnetic anisotropy of at least 1.40, and a remanent coercivity of at least 3500 Oe.
9. The method according to claim 5 , wherein the magnetic recording medium has an in-plane magnetic anisotropy of at least 1.40, and a remanent coercivity of at least 3200 Oe.