Method of manufacturing a semiconductor device with self-aligned contacts
View Patent ↗A method of manufacturing a semiconductor device on a semiconductor substrate having a first region and a second region. This method beings by forming a transistor in the first region of said semiconductor substrate. This transistor includes a pair of impurity diffusion regions and a gate electrode. Then forming a first insulating film over the first and second regions with this first insulating film covering the transistor in the first region. Thereafter, patterning the first insulating film to selectively remove the first insulating film in the second region. Then forming a second insulating film over the first and second regions. Thereafter, forming at least one contact hole through the second and first insulating film. The contact hole reaches one of the impurity diffusion regions. Finally, forming a conductive layer in the contact hole.
1. A method of manufacturing a semiconductor device on a semiconductor substrate having a first region and a second region, comprising the steps of:
forming a transistor in said first region of said semiconductor substrate, said transistor including a pair of impurity diffusion regions and a gate electrode;
forming a first insulating film over said first and second regions, said first insulating film covering said transistor in the first region;
patterning said first insulating film to selectively remove said first insulating film in said second region;
forming a second insulating film over said first and second regions;
forming at least one contact hole through said second and first insulating film, said contact hole reaching one of said impurity diffusion regions; and
forming a conductive layer in said contact hole,
wherein said first region is a memory cell region, said second region is a peripheral circuit region, and said first insulating film is a silicon nitride film in which said silicon nitride film covers said memory cell region, but is removed in said peripheral circuit region.
2. The method of manufacturing a semiconductor device according to claim 1 , further comprising the step of planarizing said second insulating film after forming said second insulating film.
3. The method of manufacturing a semiconductor device according to claim 1 , wherein said second insulating film is an oxide film.
4. The method of manufacturing a semiconductor device according to claim 2 , wherein said second insulating film is an oxide film.
5. A method of manufacturing a semiconductor device on a semiconductor substrate having a first region and a second region, comprising the steps of:
forming a transistor in said first region of said semiconductor substrate, said transistor including a pair of impurity diffusion regions and a gate electrode;
forming a first insulating film over said first and second regions, said first insulating film covering said transistor in the first region;
patterning said first insulating film to selectively remove said first insulating film in said second region;
forming a second insulating film over said first and second regions;
forming at least one contact hold through said second and first insulating films, said contact holes reaching one of said impurity diffusion regions;
embedding a conductive layer in said contact hole to form a conductive plug;
forming a third insulating film over said second insulating film covering said conductive plug; and
patterning said third insulating film, and forming a wiring layer electrically connected to said conductive plug.
6. The method of manufacturing a semiconductor device according to claim 5 , further comprising the step of planarizing said second insulating film after forming said second insulating film.
7. The method of manufacturing a semiconductor device according to claim 5 , wherein said second insulating film is an oxide film.
8. The method of manufacturing a semiconductor device according to claim 6 , wherein said second insulating film is an oxide film.
9. A method of manufacturing a semiconductor device on a semiconductor substrate having a first region and a second region, comprising the steps of:
forming a transistor in said first region of said semiconductor substrate, said transistor including a pair of impurity diffusion regions and a gate electrode;
forming a first insulating film over said first and second regions, said first insulating film covering said transistor in the first region;
patterning said first insulating film to selectively remove said first insulating film in said second region;
forming a second insulating film over said first and second regions;
forming at least one contact hole through said second and first insulating films, said contact hole reaching one of said impurity diffusion regions;
embedding a conductive layer in said contact hole to form a conductive plug;
forming a third insulating film over said second insulating film covering said conductive plug;
patterning said third insulating film and forming a wiring layer electrically connected to said conductive plug; and
etching said third and second insulating films in said second region and forming another wiring layer electrically connected to said semiconductor substrate in said second region.
10. The method of manufacturing a semiconductor device according to claim 9 , further comprising the step of planarizing said second insulating film after forming said second insulating film.
11. The method of manufacturing a semiconductor device according to claim 9 , wherein said second insulating film is an oxide film.
12. The method of manufacturing a semiconductor device according to claim 10 , wherein said second insulating film is an oxide film.