Flat panel display device
View Patent ↗A method of manufacturing a flat panel display device using fewer masks and resulting in a device with high brightness is disclosed. The resulting devices includes at least first to fourth thin film transistors, the first, third, and fourth thin film transistors having a first conductive type, and the second thin film transistors having a second conductive type. The method includes: a) providing a substrate having a non-display region on which the first thin film transistor and the second thin film transistor are formed, and a display region on which the third thin film transistor and the fourth thin film transistor are formed; b) forming first to fourth semiconductor layers of the first to the fourth thin film transistors on the substrate; c) forming a gate insulating layer over the whole surface of the substrate; d) forming first to fourth conductive patterns and a pixel electrode on the gate insulating layer, the first to fourth conductive patterns formed over the first to fourth semiconductor layers, the pixel electrode formed over a portion of the display region; e) forming first to fourth gate electrodes and a fifth conductive pattern, the first to fourth gate electrodes formed on the first to fourth conductive patterns, respectively, the fifth conductive pattern formed on the pixel electrode; f) ion-implanting a first conductive-type high-density impurity into the first, third, and fourth semiconductor layers to form first conductive-type high-density source and drain regions; g) etching the first to fourth conductive patterns using the first to fourth gate electrodes as an etching mask; h) forming a photoresist pattern to expose a portion of the non-display region corresponding to the second semiconductor layer; and i) ion-implanting a second conductive-type high-density impurity into the second semiconductor layer to form second conductive-type high-density source and drain regions.
1. A flat panel display device, comprising:
first to fourth semiconductor layers formed on a substrate, the first to fourth semiconductor layers including first to fourth source and drain regions, respectively, the second source and drain regions having a different conductivity from the first, third, and fourth source and drain regions;
a gate insulating layer formed over an entire first surface of the substrate;
first to fourth conductive patterns formed on portions of the gate insulating layer and corresponding to the first to fourth semiconductor layers, respectively;
first to fourth gate electrodes formed on the first to fourth conductive patterns;
a pixel electrode formed on a portion of the gate insulating layer adjacent to the fourth conductive pattern;
an interlayer insulating layer formed over said entire first surface of the substrate; first to fourth source and drain electrodes contacting the first to fourth source and drain regions, respectively;
a planarization layer formed over said entire first surface of the substrate; and
an opening portion exposing the pixel electrode.
2. The device of claim 1 , wherein the first to fourth conductive patterns are constructed of the same material as the pixel electrode.
3. The device of claim 2 , wherein the pixel electrode is constructed of a transparent conductive material.
4. The device of claim 1 , wherein the first to fourth source and drain regions have a lightly doped drain structure or an offset structure.
5. The device of claim 1 , further comprising a fifth conductive pattern formed on the pixel electrode.
6. A flat panel display device, comprising:
first to fourth semiconductor layers formed on a substrate, the first to fourth semiconductor layers including first to fourth source and drain regions, respectively, the second source and drain regions having a different conductivity from the first, third, and fourth source and drain regions;
a gate insulating layer formed over an entire first surface of the substrate;
first to fourth conductive patterns formed on portions of the gate insulating layer and corresponding to the first to fourth semiconductor layers, respectively;
first to fourth gate electrodes formed on the first to fourth conductive patterns;
a pixel electrode formed on a portion of the gate insulating layer adjacent to the fourth conductive pattern;
an interlayer insulating layer formed over said entire first surface of the substrate; first to fourth source and drain electrodes contacting the first to fourth source and drain regions, respectively;
a planarization layer formed over said entire first surface of the substrate; and
an opening portion in the planarization layer exposing the pixel electrode;
wherein the pixel electrode is beneath the planarization layer.
7. The device of claim 6 , wherein the first to fourth conductive patterns are constructed of the same material as the pixel electrode.
8. The device of claim 7 , wherein the pixel electrode is constructed of a transparent conductive material.
9. The device of claim 6 , wherein the first to fourth source and drain regions have a lightly doped drain structure or an offset structure.
10. The device of claim 6 , further comprising a fifth conductive pattern formed on the pixel electrode.
11. A flat panel display device, comprising:
first to fourth semiconductor layers formed on a substrate, the first to fourth semiconductor layers including first to fourth source and drain regions, respectively, the second source and drain regions having a different conductivity from the first, third, and fourth source and drain regions;
a gate insulating layer formed over an entire first surface of the substrate;
first to fourth conductive patterns formed on portions of the gate insulating layer and corresponding to the first to fourth semiconductor layers, respectively;
first to fourth gate electrodes formed on the first to fourth conductive patterns;
a pixel electrode formed on a portion of the gate insulating layer adjacent to the fourth conductive pattern;
an interlayer insulating layer formed over said entire first surface of the substrate; first to fourth source and drain electrodes contacting the first to fourth source and drain regions, respectively;
a planarization layer formed over said entire first surface of the substrate; and
an opening portion exposing the pixel electrode;
wherein the first to fourth conductive patterns are constructed of the same material as the pixel electrode.
12. The device of claim 11 , wherein the pixel electrode is constructed of a transparent conductive material.
13. The device of claim 11 , wherein the first to fourth source and drain regions have a lightly doped drain structure or an offset structure.
14. The device of claim 11 , further comprising a fifth conductive pattern formed on the pixel electrode.