IP Library › Granted Patent US 6,723,643
Granted Patent Utility
US 6,723,643 · Confirmation No. 5926

METHOD FOR CHEMICAL MECHANICAL POLISHING OF THIN FILMS USING END-POINT INDICATOR STRUCTURES

Patented Case View Patent ↗
⬇ PDF
 Code Description Pages PDF
2013-03-18 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-03-18 N570 Communication - Re: Power of Attorney (PTOL-308) 1 View
2013-02-04 PA.. Power of Attorney 2 View
2013-02-04 N417 Electronic Filing System Acknowledgment Receipt 2 View
2013-02-04 R3.73 Assignee showing of ownership per 37 CFR 3.73 2 View
2005-03-08 EBCC.AD Notice of Change of Address Place in File Wrapper Due to Electronic Business Center(EBC) Customer Number Update 1 View
2004-02-12 IFEE Issue Fee Payment (PTO-85B) 1 View
2004-02-12 LET. Miscellaneous Incoming Letter 1 View
2004-02-12 DRW Drawings-only black and white line drawings 4 View
2003-12-08 NOA Notice of Allowance and Fees Due (PTOL-85) 4 View
2003-12-08 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2003-12-08 1449 List of References cited by applicant and considered by examiner 1 View
2003-12-08 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2003-12-08 FWCLM Index of Claims 1 View
2003-12-08 SRFW Search information including classification, databases and other search related notes 1 View
2003-11-25 SRNT Examiner's search strategy and results 2 View
2003-03-17 TRNA Transmittal of New Application 3 View
2003-03-17 SPEC Specification 7 View
2003-03-17 CLM Claims 5 View
2003-03-17 ABST Abstract 1 View
2003-03-17 DRW Drawings-only black and white line drawings 4 View
2003-03-17 OATH Oath or Declaration filed 5 View
2003-03-17 WCLM Claims Worksheet (PTO-2022) 1 View
2003-03-17 WFEE Fee Worksheet (SB06) 1 View
2003-03-17 WFEE Fee Worksheet (SB06) 1 View
2003-03-17 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this application's details
Quick Facts
Patent No.
US 6,723,643
App. No.
10/391,435
Filed
2003-03-17
Granted
2004-04-20
Art Unit
2829
PTA
-69 days