Apparatus and computer-readable medium for assisting image classification
View Patent ↗An inspection system 1 includes an image pickup apparatus 2 for picking up an image of a defect, an inspection and classification apparatus 4 for performing inspection and automatic classification of defects, and a host computer 5 . The host computer 5 performs learning for automatic classification at the inspection and classification apparatus 4 . For creation of training data to be used for learning, defect images are arranged on a display of the host computer 5 on the basis of sizes of defects or imaging positions for picking up images of defects. A visual sign is provided to the defect image indicating a category assigned thereto. Further, in response to an operation by an operator, a statistical value of feature values of defect images included in a category, data obtained in inspection, images after being subjected to image processing, similar images or dissimilar images similar to or dissimilar to a defect image targeted for classification, an area directed to calculation of feature values in a defect image targeted for classification, and the like, are suitably displayed.
1. An apparatus for assisting an input to classify an image of an object, said image being obtained in inspection, comprising:
a display for displaying images;
an input device for accepting an input to classify an image of an object on a substrate; and
a processing part for deciding order of a plurality of objects on the basis of imaging positions for picking up a plurality of images, prepared in advance, of said plurality of objects, to arrange said plurality of images on said display according to said order, said imaging positions being selectable between absolute positions on a substrate and relative positions in a plurality of reference regions on said substrate and providing a visual sign indicative of a defect class of each of said plurality of objects, said visual sign being an outline surrounding each of said plurality of images and at least a property of said outline varying in accordance to the defect class of each of said plurality of objects.
2. An apparatus for assisting an input to classify an image of an object, said image being obtained in inspection, comprising:
a display for displaying images;
an input device for accepting an input to classify an image of an object; and
a processing part for arranging a plurality of images prepared in advance each indicating an object, in a window on said display according to order of a plurality of objects on the basis of sizes of said plurality of objects indicated by said plurality of images, or on the basis of imaging positions for picking up said plurality of images of said plurality of objects, while specifying a defect class assigned to each of said plurality of images, and providing a visual sign indicative of the defect class of each of said plurality of objects, said visual sign being an outline surrounding each of said plurality of images and at least a property of said outline varying in accordance to the defect class of each of said plurality of objects.
3. An apparatus for assisting an input to classify an image of an object, said image being obtained in inspection, comprising:
a display for displaying images;
an input device for accepting an input to classify an image of an object; and
a processing part for performing image processing which changes pixel values included in said image of said object, to display a plurality of images after being subjected to image processing together with said image of said object on said display and providing a visual sign indicative of a defect class of said object, said visual sign being an outline surrounding each of said plurality of images and at least a property of said outline varying in accordance to the defect class of said object.
4. The apparatus according to claim 3 , further comprising:
a receiver for receiving data of an image of an object from an inspection apparatus for sequentially inspecting a plurality of objects to be inspected; and
a memory for storing said data of said image.
5. An apparatus for assisting an input to classify an image of an object, said image being obtained in inspection, comprising
a display for displaying image,
an input device for accepting an input to classify an image of an object; and
a processing part for calculating feature values of a plurality of images prepared in advance each indicating an object, and a feature values of an image targeted for an input of a defect class, to distinctively display selected images among said plurality of images on said display, each of said selected images having a larger difference in feature value from said image targeted for said input of said defect class than a predetermined value, each of said selected images displayed on said display being provided a visual sign indicative of a defect class of said object, said visual sign being an outline surrounding each of said selected images and at least a property of said outline varying in accordance to the defect class of said object.
6. The apparatus according to claim 5 , further comprising:
a receiver for receiving data of an image of an object from an inspection apparatus for sequentially inspecting a plurality of objects to be inspected; and
a memory for storing said data of said image.
7. An apparatus for assisting an input to classify an image of an object, said image being obtained in inspection, comprising:
a display for displaying an image;
an input device for accepting an input to classify an image of an object; and
a processing part for specifying an area of said image of said object, said area being directed to calculation of a feature value to be referred to for an input of a defect class and said area being a partial region of said image, to display said feature value and said image of said object on said display in a manner allowing said area to be distinctively indicated and providing a visual sign indicative of the defect class of said object, said visual sign being an outline surrounding said image of the object and at least a property of said outline varying in accordance to the defect class of said object.
8. The apparatus according to claim 7 , further comprising:
a receiver for receiving data of an image of an object from an inspection apparatus for sequentially inspecting a plurality of objects to be inspected; and
a memory for storing said data of said image.
9. A computer-readable medium carrying a program for assisting an input to classify an image of an object to be inspected on a substrate, said image being obtained in inspection, wherein execution of said program by a computer causes said computer to perform the steps of:
deciding order of a plurality of objects on the basis of imaging positions for picking up a plurality of images, prepared in advance, of said plurality of objects, said imaging positions being selectable between absolute positions on a substrate and relative positions in a plurality of reference regions on said substrate;
arranging said plurality of images on a display according to said order; and
providing a visual sign indicative of a defect class of each of said plurality of objects, said visual sign being an outline surrounding each of said plurality of images and at least a property of said outline varying in accordance to the defect class of each of said plurality of objects.
10. A computer-readable medium carrying a program for assisting an input to classify an image of an object, said image being obtained in inspection, wherein execution of said program by a computer causes said computer to perform the steps of:
specifying a defect class assigned to each of plurality of images, said plurality of images being prepared in advance each indicating an object; and
arranging said plurality of images in a window on a display according to order of a plurality of objects on the basis of sizes of said plurality of objects indicated by said plurality of images, or on the basis of imaging positions for picking up said plurality of images of said plurality of objects while providing a visual sign indicative of a defect class of each of said plurality of objects, said visual sign being an outline surrounding each of said plurality of images and at least a property of said outline varying in accordance to the defect class of each of said plurality of objects.
11. A computer-readable medium carrying a program for assisting an input to classify an image of an object, said image being obtained in inspection, wherein execution of said program by a computer causes said computer to perform the steps of:
performing image processing which changes pixel values included in said image of said object;
displaying a plurality of images after being subjected to image processing together with said image of said object on a display; and
providing a visual sign indicative of a defect class of said object, said visual sign being an outline surrounding each of said plurality of images and at least a property of said outline varying in accordance to the defect class of said object.
12. A computer-readable medium carrying a program for assisting an input to classify an image of an object, said image being obtained in inspection, wherein execution of said program by a computer causes said computer to perform the steps of:
calculating feature values of a plurality of images prepared in advance each indicating an object, and a feature values of an image targeted for an input of a defect class; and
distinctively displaying selected images among said plurality of images on a display, each of said selected images having a larger difference in feature value from said image targeted for said input of said defect class than a predetermined value, each of said selected images displayed on said display being provided a visual sign indicative of a defect class of said object, said visual sign being an outline surrounding each of said selected images and at least a property of said outline varying in accordance to the defect class of said object.
13. A computer-readable medium carrying a program for assisting an input to classify an image of an object, said image being obtained in inspection, wherein execution of said program by a computer causes said computer to perform the steps of:
specifying an area of said image of said object, said area being directed to calculation of a feature value to be referred to for an input of a defect class and said area being a partial region of said images; and
displaying said feature value and said image of said object on a display in a manner allowing said area to be distinctively indicated and providing a visual sign indicative of the defect class of said object, said visual sign being an outline surrounding said image of the object and at least a property of said outline varying in accordance to the defect class of said object.