Liquid crystal display device and method of manufacturing the same
View Patent ↗A liquid crystal display, and a method of manufacturing thereof, includes providing a substrate; depositing sequentially a first metal layer and a first insulating layer on the substrate; patterning the first metal layer and the first insulating layer using a first mask to form a gate line and a first gate insulating layer; depositing sequentially a second gate insulating layer, a pure semiconductor layer, a doped semiconductor layer and a second metal layer over the whole substrate; patterning the second metal layer using a second mask to form a data line, source and drain electrodes, a capacitor electrode, the capacitor electrode overlapping a portion of the gae line; etching the doped semiconductor layer between the source and drain electrodes to form a channel region; depositing a third insulating layer over the whole substrate; patterning the third insulating layer using a third mask to form a passivation film, the passivation film having a smaller width than the data line and covering the source and drain electrodes and exposing a portion of the drain electrode and the capacitor electrode; depositing a transparent conductive material layer over the whole substrate; and patterning the transparent conductive material layer using a fourth mask to pixel electrode, the pixel electrode contacting the drain electrode.
1. A liquid crystal display device, comprising:
a substrate;
a thin film transistor formed on the substrate, including:
a gate line having a gate electrode;
a first insulating layer on said substrate and a second insulating layer on a surface of the first insulating layer, the lateral edges of said first insulating layer being substantially aligned with the lateral edges of said gate line such that a width of said first insulating layer is less than or equal to a width of said gate line;
an active layer; and
source and drain electrodes;
a pixel electrode overlapping a portion of the gate lines and contacting the drain electrode; and
a storage capacitor including:
a portion of the gate line as a first electrode;
a second electrode overlapping the portion of the gate line; first and second insulating layers; and
a pure semiconductor layer and a doped semiconductor layer interposed between the gate line and the pixel electrode.
2. The liquid crystal display device of claim 1 , wherein the gate line includes a gate pad formed at its terminal portion, the gate pad including at least one pad contact hole.
3. The liquid crystal display device of claim 1 , further comprising a gate pad electrode, the gate pad electrode contacting the gate pad through the at least one pad contact hole.
4. The liquid crystal device of claim 1 , wherein a crossing point between the gate line and data line is insulated by the second insulating layer, the pure semiconductor layer and the doped semiconductor layer.