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App. No. 10/401,016 · Confirmation No. 4567

Plasma etcher with heated ash chamber base

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2007-01-17 ABN Abandonment 2 View
2006-05-02 CTFR Final Rejection 7 View
2006-05-02 FWCLM Index of Claims 1 View
2006-05-02 SRFW Search information including classification, databases and other search related notes 1 View
2006-05-01 SRNT Examiner's search strategy and results 8 View
2006-02-15 A... Amendment/Request for Reconsideration-After Non-Final Rejection 5 View
2006-02-15 CLM Claims 3 View
2006-02-15 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2006-02-15 WFEE Fee Worksheet (SB06) 1 View
2005-11-29 CTNF Non-Final Rejection 6 View
2005-11-29 892 List of references cited by examiner 1 View
2005-11-29 FOR Foreign Reference 13 View
2005-11-29 FWCLM Index of Claims 1 View
2005-11-29 SRFW Search information including classification, databases and other search related notes 1 View
2005-11-23 SRNT Examiner's search strategy and results 8 View
2005-09-07 AP.B Appeal Brief Filed 13 View
2005-09-07 LET. Miscellaneous Incoming Letter 1 View
2005-07-08 N/AP Notice of Appeal Filed 1 View
2005-06-27 CTAV Advisory Action (PTOL-303) 3 View
2005-06-27 892 List of references cited by examiner 1 View
2005-06-27 FWCLM Index of Claims 1 View
2005-06-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 5 View
2005-06-08 REM Applicant Arguments/Remarks Made in an Amendment 6 View
2005-06-08 LET. Miscellaneous Incoming Letter 5 View
2005-06-08 REM Applicant Arguments/Remarks Made in an Amendment 5 View
2005-06-08 WFEE Fee Worksheet (SB06) 1 View
2005-04-15 CTFR Final Rejection 6 View
2005-04-15 892 List of references cited by examiner 1 View
2005-04-15 FWCLM Index of Claims 1 View
2005-04-15 SRFW Search information including classification, databases and other search related notes 1 View
2005-01-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 4 View
2005-01-20 SPEC Specification 1 View
2005-01-20 CLM Claims 2 View
2005-01-20 REM Applicant Arguments/Remarks Made in an Amendment 9 View
2005-01-20 136A Authorization for Extension of Time all replies 4 View
2005-01-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 5 View
2005-01-20 WFEE Fee Worksheet (SB06) 1 View
2004-11-09 CTNF Non-Final Rejection 8 View
2004-11-09 1449 List of References cited by applicant and considered by examiner 1 View
2004-11-09 892 List of references cited by examiner 1 View
2004-11-09 FWCLM Index of Claims 1 View
2004-11-09 SRFW Search information including classification, databases and other search related notes 1 View
2004-11-09 BIB Bibliographic Data Sheet 1 View
2004-11-03 SRNT Examiner's search strategy and results 3 View
2003-03-26 TRNA Transmittal of New Application 5 View
2003-03-26 A.PE Preliminary Amendment 5 View
2003-03-26 SPEC Specification 7 View
2003-03-26 CLM Claims 3 View
2003-03-26 ABST Abstract 1 View
2003-03-26 DRW Drawings-only black and white line drawings 2 View
2003-03-26 OATH Oath or Declaration filed 4 View
2003-03-26 WFEE Fee Worksheet (SB06) 1 View
2003-03-26 WFEE Fee Worksheet (SB06) 1 View
2003-03-26 IDS Information Disclosure Statement (IDS) Form (SB08) 3 View
2003-03-26 1449 List of References cited by applicant and considered by examiner 1 View
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Quick Facts
App. No.
10/401,016
Filed
2003-03-26
Pub. No.
US20030183252A1
Art Unit
1763