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App. No. 10/403,269 · Confirmation No. 3615

Etching composition and use thereof with feedback control of HF in BEOL clean

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2006-05-30 ABN Abandonment 2 View
2006-05-30 SRFW Search information including classification, databases and other search related notes 1 View
2005-10-27 CTFR Final Rejection 12 View
2005-10-27 892 List of references cited by examiner 1 View
2005-10-27 SRFW Search information including classification, databases and other search related notes 1 View
2005-10-22 SRNT Examiner's search strategy and results 1 View
2005-08-10 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-08-10 SPEC Specification 1 View
2005-08-10 CLM Claims 3 View
2005-08-10 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2005-08-10 PA.. Power of Attorney 2 View
2005-08-10 LET. Miscellaneous Incoming Letter 1 View
2005-08-10 WFEE Fee Worksheet (SB06) 1 View
2005-05-10 CTNF Non-Final Rejection 11 View
2005-05-10 892 List of references cited by examiner 1 View
2005-05-10 FOR Foreign Reference 8 View
2005-05-10 BIB Bibliographic Data Sheet 1 View
2005-05-10 SRFW Search information including classification, databases and other search related notes 1 View
2005-05-05 SRNT Examiner's search strategy and results 9 View
2005-03-21 A.PE Preliminary Amendment 3 View
2005-03-21 SPEC Specification 2 View
2005-03-21 CLM Claims 7 View
2005-03-21 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2005-03-21 PA.. Power of Attorney 2 View
2005-03-21 136A Authorization for Extension of Time all replies 3 View
2005-03-21 WFEE Fee Worksheet (SB06) 1 View
2005-03-21 WFEE Fee Worksheet (SB06) 1 View
2005-03-21 WFEE Fee Worksheet (SB06) 1 View
2005-03-21 FWCLM Index of Claims 1 View
2003-08-06 ADS Application Data Sheet 6 View
2003-03-31 TRNA Transmittal of New Application 2 View
2003-03-31 ADS Application Data Sheet 3 View
2003-03-31 SPEC Specification 13 View
2003-03-31 CLM Claims 4 View
2003-03-31 ABST Abstract 1 View
2003-03-31 DRW Drawings-only black and white line drawings 4 View
2003-03-31 OATH Oath or Declaration filed 4 View
2003-03-31 136A Authorization for Extension of Time all replies 2 View
2003-03-31 WFEE Fee Worksheet (SB06) 1 View
2003-03-31 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
10/403,269
Filed
2003-03-31
Pub. No.
US20030209514A1
Art Unit
1765