Methods of making, positioning and orienting nanostructures, nanostructure arrays and nanostructure devices
View Patent ↗Nanostructure manufacturing methods and methods for assembling nanostructures into functional elements such as junctions, arrays and devices are provided. Systems for practicing the methods are also provided.
1. A method of forming nanostructures, the method com prising:
patterning a nanostructure catalyst on a substrate in a plurality of non-spherical patterned elements, wherein a plurality of different nanostructure catalysts are patterned into the patterned elements;
heating the catalyst patterned elements to form nanostructure catalyst spheres, wherein thickness and/or lateral dimension of the patterned elements controls the corresponding diameter of the catalyst spheres;
adding nanostructure precursors to the catalyst spheres; and,
forming nanostructures from the catalyst spheres in the presence of the nanostructure precursors.
2. The method of claim 1 , wherein the different nanostructure catalysts comprise a gold catalyst and an iron catalyst.
3. A method of forming nanostructures, the method comprising:
patterning a nanostructure catalyst on a substrate in a plurality of non-spherical patterned elements, wherein the patterned elements differ in size or composition, wherein sets of patterned elements that differ in size or composition are patterned sequentally;
heating the catalyst patterned elements to form nanostructure catalyst spheres, wherein thickness and/or lateral dimension of the patterned elements controls the corresponding diameter of the catalyst spheres;
adding nanostructure precursors to the catalyst spheres; and,
forming nanostructures from the catalyst spheres in the presence of the nanostructure precursors.
4. A method of forming nanostructures, the method comprising:
patterning a nanostructure catalyst on a substrate in a plurality of non-spherical patterned elements;
heating the catalyst patterned elements to form nanostructure catalyst spheres, wherein thickness and/or lateral dimension of the patterned elements controls the corresponding diameter of the catalyst spheres;
adding nanostructure precursors to the catalyst spheres; and,
forming nanostructures from the catalyst spheres in the presence of the nanostructure precursors;
wherein the patterned elements differ in size or composition, wherein sets of patterned elements that differ in size or composition are patterned into a crossing array of components.
5. A method of forming nanostructures, the method comprising:
patterning a first set of nanostructure catalysts on a substrate in a plurality of non-spherical patterned elements;
heating the catalyst patterned elements to form nanostructure catalyst spheres, wherein thickness and/or lateral dimension of the patterned elements controls the corresponding diameter of the catalyst spheres;
adding a first set of nanostructure precursors to the catalyst spheres;
forming nanostructures from the catalyst spheres in the presence of the first set of nanostructure precursors; and
repeating the patterning, heating, adding and forming steps with a second set of nanostructure catalysts and a second set of nanostructure precursors.
6. The method of claim 5 , wherein the first and second sets of nanostructure catalysts and nanostructure precursors are different.
7. The method of claim 6 , wherein any remaining nanostructure catalyst from the first patterning, beating, adding and forming steps is removed prior to the second patterning, heating, adding and forming steps.
8. The method of claim 7 , wherein the remaining nanostructure catalyst is removed by selective etching.
9. The method of claim 8 , wherein the remaining nanostructure catalyst is removed by selectively etching an etchable region of the nanostructure below the nanostructure catalyst.
10. The method of claim 8 , wherein the selective etching is performed with an acidic etchant.