Laser apparatus, exposure head, exposure apparatus, and optical fiber connection method
View Patent ↗An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.
1. An exposure head comprising:
a laser apparatus including a fiber light source which includes an optical fiber with an incidence end and an emission end, the fiber light source emitting laser light that enters the incidence end of the optical fiber from the emission end of the optical fiber, the optical fiber including an optical fiber having a uniform core diameter and a cladding diameter of the emission end which is smaller than a cladding diameter of the incidence end;
a spatial modulation element which modulates laser light irradiated from the laser apparatus, the spatial modulation element including numerous pixel portions, light modulation states of which change in accordance with respective control signals, the pixel portions being arranged in a two-dimensional form on a support; and
an optical system for focusing laser light that has been modulated at the pixel portions on an exposure surface.
2. The exposure head of claim 1 , wherein the spatial modulation element comprises a micromirror device which includes numerous micromirrors arranged in the two-dimensional form on the support, angles of reflection surfaces of the micromirrors being changeable in accordance with the respective control signals.
3. The exposure head of claim 1 , wherein the spatial modulation element comprises a grating light valve which includes numerous movable grilles, which are provided with ribbon-like reflection surfaces and are movable in accordance with the control signals, and fixed grilles, which are provided with ribbon-like reflection surfaces, the numerous movable grilles and fixed grilles being alternately disposed in parallel.
4. The exposure head of claim 1 , further comprising, at an emission side of the spatial modulation element, a microlens array which includes microlenses which are disposed in correspondence with the pixel portions of the spatial modulation element for condensing the laser light at each pixel.
5. The exposure head of claim 1 , further comprising, between the laser apparatus and the spatial modulation element:
a collimator lens for making luminous flux from the laser apparatus parallel flux; and
a light intensity distribution-correcting optical system which converts a luminous flux width at each of emission positions thereof such that a ratio of a luminous flux width at a peripheral edge portion to a luminous flux width at a central portion, which is near an optical axis, is smaller at an emission side of the light intensity distribution-correcting optical system than at an incidence side thereof, and corrects a light intensity distribution of the laser light that has been converted to parallel flux by the collimator lens so as to be substantially uniform at irradiated surfaces of the spatial modulation element.
6. An exposure apparatus comprising:
an exposure head which includes
a laser apparatus including a fiber light source which includes an optical fiber with an incidence end and an emission end, the fiber light source emitting laser light that enters the incidence end of the optical fiber from the emission end of the optical fiber, the optical fiber including an optical fiber having a uniform core diameter and a cladding diameter of the emission end which is smaller than a cladding diameter of the incidence end,
a spatial modulation element which modulates laser light irradiated from the laser apparatus, the spatial modulation element including numerous pixel portions, light modulation states of which change in accordance with respective control signals, the pixel portions being arranged in a two-dimensional form on a support, and
an optical system for focusing laser light that has been modulated at the pixel portions on an exposure surface; and
moving means which moves the exposure head relatively with respect to the exposure surface.