Semiconductor integrated circuit including a DRAM and an analog circuit
View Patent ↗A semiconductor device including an interlayer insulation film formed on a substrate so as to cover first and second regions defined on the substrate, and a capacitor formed over the interlayer insulation film in the first region, wherein the interlayer insulation film includes, in the first region, a stepped part defined by a groove having a bottom surface lower in level than a surface of the interlayer insulation film in the second region.
1. A method of fabricating a semiconductor integrated circuit, comprising the steps of:
forming a first insulation film over a substrate including a first region and a second region such that said first insulation film covers said first region and said second region;
forming a first trench and a second trench in said first insulation film such that said first trench is located over said first region and said second trench is located over said second region of said substrate;
filling said first trench and said second trench by a first conductive film to form a first electrode in said first trench and a second electrode in said second trench;
forming a second insulation film over said interlayer insulation film so as to cover said first and second electrodes;
forming a third trench in said second insulation film so as to expose said second electrode;
forming a third electrode and a fourth electrode over said second insulation film simultaneously, wherein a capacitor element is formed by sandwiching said second insulation film between said third electrode and said first electrode and wherein said fourth electrode makes contact with said second electrode at said third trench;
forming a third insulation film over said second insulation film so as to cover said third and fourth electrodes; and
forming a fourth trench in said third insulation film, said step of forming said fourth trench being conducted while using said second insulation film as an etching stopper.
2. A method of fabricating a semiconductor integrated circuit, comprising the steps of:
forming a first insulation film over a substrate;
forming a trench in said first insulation film;
filling said trench with a first conductive film to form a first electrode in said trench;
forming a second insulation film so as to cover said first electrode;
forming a second electrode over said second insulation film, such that a capacitor element is formed by sandwiching said second insulation film between said second electrode and said first electrode;
forming a third insulation film over said second insulation film so as to cover said first and second electrodes; and
forming a second trench in said third insulation film, said step of forming said second trench being conducted while using said second insulation film as an etching stopper.
3. A method of fabricating a semiconductor integrated circuit, comprising the steps of:
forming a first insulation film over a substrate including a first region and a second region such that said first insulation film covers said first region and said second region;
forming a first trench and a second trench in said first insulation film such that said first trench is located over said first region and said second trench is located over said second region of said substrate;
filling said first trench and said second trench by a first conductive film to form a first electrode in said first trench and a second electrode in said second trench;
forming a second insulation film over said interlayer insulation film so as to cover said first and second electrodes;
forming a third electrode such that said second insulation film is sandwiched between said third electrode and said first electrode and such that said third electrode forms a capacitor element together with said first electrode and said second insulation film;
forming a third insulation film over said second insulation film so as to cover said third electrode; and
forming a third trench in said third insulation film so as to expose said second electrode, wherein said second insulation film acts as an etching stopper when said third trench is formed in said third insulation film.