Drop generator for ultra-small droplets
View Patent ↗A drop generator includes a substrate, and a mandrel that is disposed on the substrate for shaping the drop generator chamber. The mandrel is covered by the orifice member and thereafter removed.
1. A method of making a drop generator, comprising:
providing a substrate having an inlet opening;
applying removable material on the substrate and in the inlet opening;
shaping some of the removable material to define a chamber region;
forming an orifice member on the substrate to cover substantially all of the removable material but for an orifice in the orifice member; and
removing the removable material from the chamber region and the inlet opening to form a chamber having an inlet.
2. The method of claim 1 wherein applying includes applying a layer of spin-on glass material.
3. The method of claim 1 wherein applying includes applying a metal as the removable material.
4. The method of claim 1 wherein forming includes sizing the orifice to be about 2 μm in diameter.
5. The method of claim 1 wherein shaping the removable material as chamber includes sizing the material so that the chamber volume is about 25 femtoliters.
6. The method of claim 1 wherein the removable material is applied on one side of the substrate and including forming a channel through another side of the substrate to provide fluid conununication between the channel and the inlet.
7. The method of claim 6 including removing the removable material simultaneously with or after forming the channel.
8. The method of claim 1 wherein the orifice member comprises photpolymer material.
9. The method of claim 8 including the step of exposing the photopolymer material to form the orifice member before removing the removable material.
10. The method of claim 1 including lining the inlet with a protective layer before applying the removable material.
11. The method of claim 10 wherein the removable material is appiled on one side of the substrate and including etching a channel through another side of the substrate with the protective layer in place.
12. The method of claim 11 including removing the protective layer after the channel is etched.
13. The method of claim 1 wherein removing forms the chamber between the orifice member and the substrate, and adjacent the orifice.
14. A method of making a drop generator including:
applying removable material on a substrate;
shaping some of the removable material to define a chamber region;
forming an orifice member on the substrate to cover the removable material;
making an orifice in the orifice member by planarizing the orifice member; and
removing the removable material from the substrate so that a chamber remains.
15. The method of claim 14 wherein the removing action forms the chamber between the orifice member and the substrate, and adjacent the orifice.
16. The method of claim 14 including forming an inlet in the substrate to communicate with the chamber.
17. The method of claim 16 including filling the inlet with removable material when applying the removable material on the substrate.
18. The method of claim 17 including lining the inlet with protective material before applying the removable material on the substrate.