Method of making an icosahedral boride structure
View Patent ↗A method for fabricating thin films of an icosahedral boride on a silicon carbide (SiC) substrate is provided. Preferably the icosahedral boride layer is comprised of either boron phosphide (B 12 P 2 ) or boron arsenide (B 12 As 2 ). The provided method achieves improved film crystallinity and lowered impurity concentrations. In one aspect, an epitaxially grown layer of B 12 P 2 with a base layer or substrate of SiC is provided. In another aspect, an epitaxially grown layer of B 12 As 2 with a base layer or substrate of SiC is provided. In yet another aspect, thin films of B 12 P 2 or B 12 As 2 are formed on SiC using CVD or other vapor deposition means. If CVD techniques are employed, preferably the deposition temperature is above 1050° C., more preferably in the range of 1100° C. to 1400° C., and still more preferably approximately 1150° C.
1. A method for fabricating a semiconductor device, comprising the steps of:
providing a SiC substrate; and
epitaxially growing an icosahedral boride layer on at least one surface of said SIC substrate.
2. The method of claim 1 , further comprising the step of selecting B 12 P 2 as said icosahedral bonds layer.
3. The method of claim 1 , further comprising the step of selecting B 12 P 2 as said icosahedral boride layer.
4. The method of claim 1 , further comprising the step of orienting said SIC to less than 3.5 degrees off of <0001>, wherein said orienting step is performed prior to said epitaxially growing step.
5. The method of claim 1 , further comprising the step of orienting said SiC to <0001>, wherein said orienting step is performed prior to said epitaxially growing step.
6. The method of claim 1 , further comprising the step of selecting a deposition temperature of above 1050° C., said deposition temperature associated with said epitaxially growing step.
7. The method of claim 1 , further comprising the step of selecting a deposition temperature within the range of 1100° C. to 1400° C., said deposition temperature associated with said epitaxially growing step.
8. The method of claim 1 , further comprising the step of selecting a deposition temperature of approximately 1150° C., said deposition temperature associated with said epitaxially growing step.
9. The method of claim 1 , wherein said step of epitaxially growing said icosahedral boride layer utilizes a chemical vapor deposition technique.
10. The method of claim 1 , further comprising the steps of:
degreasing said SiC substrate; and
drying said SiC in a flowing nitrogen gas environment, wherein said steps of degreasing and drying are performed prior to said epitaxially growing step.
11. A method for fabricating a semiconductor device, comprising the steps of:
providing a SiC substrate; and
depositing an icosahedral boride layer on at least one surface of said SiC substrate.
12. The method of claim 11 , further comprising the step of selecting B 12 P 2 as said icosahedral boride layer.
13. The method of claim 11 , further comprising the step of selecting B 12 As 2 as said icosahedral boride layer.
14. The method of claim 11 , further comprising the step of orienting said SiC to less than 3.5 degrees off of <0001>, wherein said orienting step is performed prior to said depositing step.
15. The method of claim 11 , further comprising the step of orienting said SIC to <0001>, wherein said orienting step is performed prior to said depositing step.
16. The method of claim 11 , further comprising the step of selecting a deposition temperature of above 1050° C., said deposition temperature associated with said depositing step.
17. The method of claim 11 , further comprising the step of selecting a deposition temperature within the range of 1100° C. to 1400° C., said deposition temperature associated with said depositing step.
18. The method of claim 11 , further comprising the step of selecting a deposition temperature of approximately 1500° C., said deposition temperature associated with said depositing step.
19. The method of claim 11 , wherein said step of depositing said icosahedral boride layer utilizes a chemical vapor deposition technique.
20. The method of claim 11 , further comprising the steps of:
degreasing said SIC substrate; and
drying said SiC in a flowing nitrogen gas environment, wherein said steps of degreasing and drying are performed prior to said depositing step.