Metal line stacking structure in semiconductor device and formation method thereof
View Patent ↗The method for forming a metal line stacking structure according to a preferred embodiment of the present invention comprises: sequentially forming a first barrier metal and a first metal layer on a lower dielectric layer that is disposed over a semiconductor substrate, and performing a plasma treatment; forming a second barrier metal on the plasma-treated first metal layer; selectively etching the second barrier metal, the first metal layer, and the first barrier metal to form a metal line layer including the second barrier metal, the first metal layer, and the first barrier metal, which respectively have a predetermined width; and sintering the metal line layer to raise a reaction between the first metal layer and the second barrier metal, thereby generating a metal compound layer.
1. A metal line stacking structure in a semiconductor device, comprising:
a metal line layer on a lower dielectric layer being disposed over the semiconductor substrate, the metal line layer having a predetermined width and including a first barrier metal, a first metal layer, and a second barrier metal that are sequentially stacked;
metal compound portions formed in interface between the first barrier metal and the first metal layer;
a metal compound layer formed in interface between the first metal layer and the second barrier metal;
an inter-level dielectric layer formed over all the lower dielectric layer and the metal line layer;
a contact hole formed in the inter-level dielectric layer, a bottom of which is positioned within the metal compound layer; and
a metal plug being filled in the contact hole,
wherein the metal compound layer has a thickness greater than that of the metal compound portion.
2. The metal line stacking structure of claim 1 , wherein the second barrier metal includes a titanium nitride (TiN) layer having a thickness of between 200 and 600 angstroms.
3. The metal line stacking structure of claim 2 , wherein the first metal layer is formed of a material selected from the group consisting of aluminum, an aluminum-copper alloy, an aluminum-copper-silicon alloy, and an aluminum-silicon alloy, and wherein the first metal layer has a thickness of between 3000 and 8000 angstroms.
4. The metal line stacking structure of claim 3 , wherein the metal compound layer comprises TiAl 3 .
5. The metal line stacking structure of claim 3 , wherein the first barrier metal includes titanium (Ti), and wherein the metal compound portions comprise TiAl 3 that is generated by a reaction between aluminum (Al) of the first metal layer and titanium (Ti) of the first barrier metal.
6. The metal line stacking structure of claim 1 , further comprising a third barrier metal formed on an inner wall of the contact hole.
7. The metal line stacking structure of claim 1 , wherein the metal compound layer under the contact hole has a thickness of more than 50 angstroms.