Method and apparatus for coating a photosensitive material
View Patent ↗In a method and an apparatus for coating an object with photosensitive material, a roller stabilizes a supply amount of the photosensitive material and is disposed between the object and a slit coater, so that the stabilized photosensitive material is supplied to the object through the slit coater. The photosensitive material includes additives for controlling amount of a solid powder, a boiling point and a surface tension thereof. Accordingly, the photosensitive material may be uniformly coated on the object.
1. A method for coating an object with a photosensitive material, comprising:
changing a fluid photosensitive material into a photosensitive material having a band form at a source, the photosensitive material having a length longer than a width thereof;
supplying the photosensitive material having the band form from the source to a first surface, which is isolated from the object, for a first time period to stabilize a supply amount of the photosensitive material;
pressurizing the photosensitive material at the source to reach to a first pressure for a second time period;
allowing the photosensitive material to stand by during a third time period until a supply amount of the photosensitive material reaches a target amount; and
supplying the photosensitive material that has reached a target amount from the source to the object, which is isolated from the first surface, at a second pressure in a direction of the width, the object being coated with the stabilized photosensitive material in a sheet form.
2. The method of claim 1 , wherein the photosensitive material comprises a solid powder from about 5 wt % to about 25 wt % and a volatile solvent from about 95 wt % to about 75 wt % so as to increase a coating speed of the photosensitive material.
3. The method of claim 1 , wherein the photosensitive material comprises a drying delaying agent for delaying a drying time of the photosensitive material.
4. The method of claim 3 , wherein the drying delaying agent comprises a boiling point higher than that of the photosensitive material, the photosensitive material comprising the drying delaying agent from about 10 wt % to about 80 wt %.
5. The method of claim 1 , wherein the photosensitive material comprises a surfactant for decreasing a surface tension thereof.
6. The method of claim 5 , wherein the surfactant comprises a fluorine-containing surfactant.
7. The method of claim 5 , wherein the photosensitive material comprises the surfactant from about 200 ppm to about 5,000 ppm.
8. The method of claim 1 , wherein a height of the photosensitive material coated on the first surface is from about 10 μm to about 200 μm.
9. The method of claim 1 , wherein the coating of the photosensitive material further comprises:
measuring a height of the photosensitive material coated on a first position of the object; and
measuring a height of the photosensitive material coated on a second position of the object spaced from the first position.
10. The method of claim 1 , further comprising drying the photosensitive material after the coating of the photosensitive material.
11. The method of claim 1 , further comprising sucking in the remaining photosensitive material into the source after the coating of the photosensitive material on the object.